臺灣博碩士論文加值系統

近幾年來，微型藥物輸送系統利用MEMS技術製造的趨勢越來越明顯，並且多數應用在醫療領域。藥物傳遞系統（Drug Delivery Systems , DDS）由藥物儲存器、微型幫浦、閥門、微型感測器、微型通道和相關電路所組成。典型的微型幫浦是MEMS一環，它可以提供驅動源，將流體或者藥物精確地輸送到身體組織或者血管。因此，微型幫浦是藥物輸送系統中的重要組成部分。
黃金電極在進行電解反應後，電極處會產生腐蝕現象，為了改善電極應用在電解式微型幫浦的耐腐蝕性。因此，本論文使用電化學沉積三種不同循環次數的氧化銥薄膜在黃金電極表面。藉由掃描式電子顯微鏡(SEM)和能量色散儀(EDS)得知，黃金電極表面成功地成長氧化銥薄膜。經X光繞射儀(XRD)結果得知，電化學沉積的氧化銥是非晶結構。利用X射線光電子能譜(XPS)量測電極表面元素，在銥與氧的軌域皆有明顯元素鍵結。透過電化學阻抗圖譜(EIS)量測電極元件，由黃金電極和氧化銥電極內部結構等效電路圖實驗結果得知，電化學沉積氧化銥電極阻抗遠低於黃金電極。由極化阻抗(Tafel)量測，氧化銥薄膜可以改善電極的耐腐蝕性。與黃金電極相比，氧化銥具有良好的耐腐蝕性。因此，使用氧化銥可以提高電極的耐腐蝕性和電化學性能。最後，本研究成功地將氧化銥應用在電解式微型幫浦之領域。

In recent years, the trend of using microelectromechanical systems (MEMS) technology to manufacture micro drug delivery systems has become increasingly evident, with a majority of applications in the medical field. Drug Delivery Systems (DDS) are composed of drug reservoirs, micro pumps, valves, microsensors, microchannels, and related circuits. A typical micro pump is an integral part of MEMS, providing the driving force to precisely deliver fluids or drugs to body tissues or blood vessels. As a result, micropumps are crucial components in drug delivery systems.
The electrode will be corroded after the gold electrode undergoes an electrolytic reaction. To improve the corrosion resistance of electrodes used in electrolytic micropumps, this thesis utilizes electrochemical deposition to grow three different cycles of iridium oxide films on the surface of gold electrodes. Scanning Electron Microscopy (SEM) and Energy Dispersive Spectroscopy (EDS) revealed the successful growth of iridium oxide films on the gold electrode surface. X-ray Diffraction (XRD) results indicated that the electrochemically deposited iridium oxide possessed an amorphous structure. X-ray Photoelectron Spectroscopy (XPS) measurements on the electrode surface revealed distinct elemental bonding in the iridium and oxygen orbitals. Electrochemical Impedance Spectroscopy (EIS) was used to measure the electrode components, and the experimental results of the equivalent circuit diagram for the gold electrode and iridium oxide electrode indicated significantly lower impedance for the electrochemically deposited iridium oxide electrode compared to the gold electrode. Tafel polarization measurements demonstrated that the iridium oxide thin film can enhance the corrosion resistance of the electrode. When compared to the gold electrode, iridium oxide exhibited excellent corrosion resistance. Therefore, using iridium oxide can improve the electrode’s corrosion resistance and electrochemical performance.
Finally, this study successfully applied iridium oxide in the field of electrolytic micropumps.

中文摘要 I
Abstract II
致謝 IV
目錄 V
圖目錄 VIII
表目錄 XI
第一章-緒論 1
1-1前言 1
1-2生物相容性 3
第二章 文獻回顧與基礎理論 6
2-1 微型幫浦介紹 6
2-2 微流量幫浦驅動方式 6
2-2-1 機械式 6
2-2-2 非機械式 13
2-3微型幫浦在生醫領域應用 18
2-3-1 細胞培養 18
2-3-2 血液輸送 19
2-3-3 藥物輸送 20
2-4 耐腐蝕材料及其定義 21
2-5氧化銥介紹 22
2-5-1 氧化銥成長方式 22
2-6電解式幫浦驅動原理 25
2-6-1 法拉第電解定律 25
2-6-2 電解理論 26
2-6-3 氣泡生長機制 26
2-6-4 幫浦效率 27
第三章 實驗製程與設備 28
3-1 元件設計 28
3-2 實驗步驟 28
3-2-1 電極製作 28
3-2-2 氧化銥電解液調製 29
3-2-3 氧化銥電極製作 29
3-2-4 幫浦外殼製作與組裝 30
3-3 實驗儀器設備 30
3-3-1電化學分析儀 30
3-3-2掃描式電子顯微鏡(Scanning Electron Microscope, SEM)和能量散射光譜
儀(Energy-dispersive X-ray spectroscopy, EDS) 32
3-3-3 X光繞射儀( X-Ray Diffration , XRD ) 33
3-3-4 X光電子能譜儀（X-ray Photoelectron Spectrometer, XPS）33
3-3-5雷射共軛焦 34
3-3-6接觸角量測 34
第四章 實驗結果與討論 46
4-1掃描式電子顯微鏡（Scanning Electron Microscopy, SEM）46
4-2雷射共軛焦 49
4-3透過循環伏安法成長氧化銥過程 54
4-4 X光繞射儀(X-Ray Diffraction, XRD) 58
4-5 X光電子能譜儀(X-ray Photoelectron Spectrometer, XPS) 59
4-6電化學阻抗圖譜(Electrochemical impedance spectroscopy, EIS) 62
4-7極化曲線(Tafel) 66
4-8流速(Flow Rate) 68
4-9接觸角(Contact angle) 82
4-10氧化銥電致變色(Electrochromic) 83
第五章 結論與未來展望 84
5-1 結論 84
5-2 未來展望 84
參考文獻 85

[1]A. Dash and G. Cudworth II, "Therapeutic applications of implantable drug delivery systems," Journal of pharmacological and toxicological methods, vol. 40, no. 1, pp. 1-12, 1998.
[2]J. L. Coll, P. Chollet, E. Brambilla, D. Desplanques, J. P. Behr, and M. Favrot, "In vivo delivery to tumors of DNA complexed with linear polyethylenimine," Human gene therapy, vol. 10, no. 10, pp. 1659-1666, 1999.
[3]N. C. Tsai and C. Y. Sue, "Review of MEMS-based drug delivery and dosing systems," Sensors and Actuators A: Physical, vol. 134, no. 2, pp. 555-564, 2007.
[4]J. Pickup, H. Keen, J. Parsons, and K. Alberti, "Continuous subcutaneous insulin infusion: an approach to achieving normoglycaemia," Br Med J, vol. 1, no. 6107, pp. 204-207, 1978.
[5]D. G. Allen and M. V. Sefton, "A model of insulin delivery by a controlled release micropump," Annals of biomedical engineering, vol. 14, pp. 257-276, 1986.
[6]J. L. Selam, "External and implantable insulin pumps: current place in the treatment of diabetes," Experimental and Clinical Endocrinology & Diabetes, vol. 109, no. Suppl 2, pp. S333-S340, 2001.
[7]C. C. Wong, J. H. Flemming, D. R. Adkins, and M. A. Plowman, "Evaluation of mini/micro-pumps for Micro-Chem-Lab™," in ASME International Mechanical Engineering Congress and Exposition, 2002, vol. 36576, pp. 477-485.
[8]P. Mruetusatorn, M. R. Mahfouz, and J. J. Wu, "Low-voltage dynamic control for DC electroosmotic devices," Sensors and Actuators A: Physical, vol. 153, no. 2, pp. 237-243, 2009.
[9]P. N. Karanth, V. Desai, and S. M. Kulkarni, "Modeling of single and multilayer polyvinylidene fluoride film for micro pump actuation," Microsystem technologies, vol. 16, pp. 641-646, 2010.
[10]N. A. Md Yunus and N. G. Green, "Fabrication of microfluidic device channel using a photopolymer for colloidal particle separation," Microsystem technologies, vol. 16, pp. 2099-2107, 2010.
[11]D. Maillefer, H. Van Lintel, G. Rey-Mermet, and R. Hirschi, "A high-performance silicon micropump for an implantable drug delivery system," in Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No. 99CH36291), 1999: IEEE, pp. 541-546.

[12]V. Singhal and S. V. Garimella, "Induction electrohydrodynamics micropump for high heat flux cooling," Sensors and Actuators A: Physical, vol. 134, no. 2, pp. 650-659, 2007.
[13]T. Zhang and Q.-M. Wang, "Valveless piezoelectric micropump for fuel delivery in direct methanol fuel cell (DMFC) devices," Journal of power sources, vol. 140, no. 1, pp. 72-80, 2005.
[14]J. Diaz, J. M. Lopera, A. M. Pernia, F. Nuno, J. A. Martinez, J. V. Comas, and L. Galletti, "A micropump for pulmonary blood flow regulation," IEEE Industrial Electronics Magazine, vol. 1, no. 1, pp. 39-44, 2007.
[15]M. Helmus and K. Tweden, "Materials selection for medical devices. Encyclopedic Handbook of Biomaterials (Donald Wise, ed., chap. 2)," ed: Marcel Dekker, Inc., New York, 1995.
[16]M. N. Helmus, Biomaterials in the design and reliability of medical devices. Springer Science & Business Media, 2003.
[17]D. F. Williams, "On the mechanisms of biocompatibility," Biomaterials, vol. 29, no. 20, pp. 2941-2953, 2008.
[18]D. F. Williams, Definitions in biomaterials: proceedings of a consensus conference of the European Society for Biomaterials, Chester, England, March 3-5, 1986. Elsevier Science Limited, 1987.
[19]J. W. Boretos, M. Eden, and Y. C. Fung, "Contemporary biomaterials: material and host response, clinical applications, new technology and legal aspects," 1985.
[20]B. D. Ratner and S. J. Bryant, "Biomaterials: where we have been and where we are going," Annu. Rev. Biomed. Eng., vol. 6, pp. 41-75, 2004.
[21]N. Angelova and D. Hunkeler, "Rationalizing the design of polymeric biomaterials," Trends in biotechnology, vol. 17, no. 10, pp. 409-421, 1999.
[22]L. Cao, S. Mantell, and D. Polla, "Design and simulation of an implantable medical drug delivery system using microelectromechanical systems technology," Sensors and Actuators A: Physical, vol. 94, no. 1-2, pp. 117-125, 2001.
[23]N.-T. Nguyen, A. H. Meng, J. Black, and R. M. White, "Integrated flow sensor for in situ measurement and control of acoustic streaming in flexural plate wave micropumps," Sensors and Actuators A: Physical, vol. 79, no. 2, pp. 115-121, 2000.
[24]L. Wallman, S. Ekström, G. Marko‐Varga, T. Laurell, and J. Nilsson, "Autonomous protein sample processing on‐chip using solid‐phase microextraction, capillary force pumping, and microdispensing," Electrophoresis, vol. 25, no. 21‐22, pp. 3778-3787, 2004.
[25]H. Suzuki and R. Yoneyama, "Integrated microfluidic system with electrochemically actuated on-chip pumps and valves," Sensors and actuators B: Chemical, vol. 96, no. 1-2, pp. 38-45, 2003.
[26]R. Ehwald, H. Woehlecke, H. Adleff, and M. Ehwald, "Method for control of the volume flux of a liquid in an osmotic micropump and osmotic micropump," ed: Google Patents, 2011.
[27]N. Nguyen and S. T. Wereley, "Microfluidics for internal flow control: micropumps," Fundam Appl Microfluidics, Artech House, pp. 293-341, 2002.
[28]F. Amirouche, Y. Zhou, and T. Johnson, "Current micropump technologies and their biomedical applications," Microsystem technologies, vol. 15, pp. 647-666, 2009.
[29]C. Zhang, D. Xing, and Y. Li, "Micropumps, microvalves, and micromixers within PCR microfluidic chips: Advances and trends," Biotechnology advances, vol. 25, no. 5, pp. 483-514, 2007.
[30]A. Machauf, Y. Nemirovsky, and U. Dinnar, "A membrane micropump electrostatically actuated across the working fluid," Journal of Micromechanics and Microengineering, vol. 15, no. 12, p. 2309, 2005.
[31]Q. Cui, C. Liu, and X. F. Zha, "Simulation and optimization of a piezoelectric micropump for medical applications," The International Journal of Advanced Manufacturing Technology, vol. 36, pp. 516-524, 2008.
[32]H. Van Lintel, F. Van de Pol, and S. Bouwstra, "A piezoelectric micropump based on micromachining of silicon," Sensors and actuators, vol. 15, no. 2, pp. 153-167, 1988.
[33]B. Ma, S. Liu, Z. Gan, G. Liu, X. Cai, H. Zhang, and Z. Yang, "A PZT insulin pump integrated with a silicon micro needle array for transdermal drug delivery," in 56th Electronic Components and Technology Conference 2006, 2006: IEEE, p. 5 pp.
[34]Y. C. Hsu, S. J. Lin, and C. C. Hou, "Development of peristaltic antithrombogenic micropumps for in vitro and ex vivo blood transportation tests," Microsystem Technologies, vol. 14, pp. 31-41, 2008.
[35]R. Linnemann, P. Woias, C. D. Senfft, and J. A. Ditterich, "A self-priming and bubble-tolerant piezoelectric silicon micropump for liquids and gases," in Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No. 98CH36176, 1998: IEEE, pp. 532-537.
[36]M. J. Zdeblick and J. B. Angell, "A microminiature electric-to-fluidic valve," in Transducers, 1987, vol. 87, p. 2.
[37]S. R. Hwang, W. Y. Sim, G. Y. Kim, S. S. Yang, and J. J. Pak, "Fabrication and test of a submicroliter-level thermopneumatic micropump for transdermal drug delivery," in 2005 3rd IEEE/EMBS Special Topic Conference on Microtechnology in Medicine and Biology, 2005: IEEE, pp. 143-145.
[38]O. C. Jeong, S. W. Park, S. S. Yang, and J. J. Pak, "Fabrication of a peristaltic PDMS micropump," Sensors and Actuators A: Physical, vol. 123, pp. 453-458, 2005.
[39]E. Makino, T. Mitsuya, and T. Shibata, "Fabrication of TiNi shape memory micropump," Sensors and Actuators A: Physical, vol. 88, no. 3, pp. 256-262, 2001.
[40]W. L. Benard, H. Kahn, A. H. Heuer, and M. A. Huff, "Thin-film shape-memory alloy actuated micropumps," Journal of Microelectromechanical systems, vol. 7, no. 2, pp. 245-251, 1998.
[41]W. L. Benard, H. Kahn, A. H. Heuer, and M. A. Huff, "A titanium-nickel shape-memory alloy actuated micropump," in Proceedings of International Solid State Sensors and Actuators Conference (Transducers' 97), 1997, vol. 1: IEEE, pp. 361-364.
[42]S. Guo and T. Fukuda, "SMA actuator-based novel type of micropump for biomedical application," in IEEE International Conference on Robotics and Automation, 2004. Proceedings. ICRA'04. 2004, 2004, vol. 2: IEEE, pp. 1616-1621.
[43]S. Guo, T. Nakamura, T. Fukuda, and K. Oguro, "Development of the micro pump using ICPF actuator," in Proceedings of International Conference on Robotics and Automation, 1997, vol. 1: IEEE, pp. 266-271.
[44]S. Guo, T. Nakamura, T. Fukuda, and K. Oguro, "Design and experiments of micro pump using ICPF actuator," in MHS'96 Proceedings of the Seventh International Symposium on Micro Machine and Human Science, 1996: IEEE, pp. 235-240.
[45]S. Guo, N. Kato, T. Fukuda, and K. Oguro, "A fish microrobot using ICPF actuator," in AMC'98-Coimbra. 1998 5th International Workshop on Advanced Motion Control. Proceedings (Cat. No. 98TH8354), 1998: IEEE, pp. 592-597.
[46]S. Guo, T. Fukuda, K. Kosuge, F. Arai, K. Oguro, and M. Negoro, "Micro catheter system with active guide wire," in Proceedings of 1995 IEEE International Conference on Robotics and Automation, 1995, vol. 1: IEEE, pp. 79-84.
[47]S. Tadokoro, S. Yamagami, M. Ozawa, T. Kimura, T. Takamori, and K. Oguro, "Soft micromanipulation device with multiple degrees of freedom consisting of high polymer gel actuators," in Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No. 99CH36291), 1999: IEEE, pp. 37-42.
[48]L. Huang, W. Wang, M. C. Murphy, K. Lian, and Z. G. Ling, "LIGA fabrication and test of a DC type magnetohydrodynamic (MHD) micropump," Microsystem technologies, vol. 6, pp. 235-240, 2000.
[49]J. Jang and S. S. Lee, "Theoretical and experimental study of MHD (magnetohydrodynamic) micropump," Sensors and Actuators A: Physical, vol. 80, no. 1, pp. 84-89, 2000.
[50]K. H. Heng, W. Wang, M. C. Murphy, and K. Lian, "UV-LIGA microfabrication and test of an AC-type micropump based on the magnetohydrodynamic (MHD) principle," in Microfluidic Devices and Systems III, 2000, vol. 4177: SPIE, pp. 161-171.
[51]G. Fuhr, R. Hagedorn, T. Muller, W. Benecke, and B. Wagner, "Pumping of water solutions in microfabricated electrohydrodynamic systems," in [1992] Proceedings IEEE Micro Electro Mechanical Systems, 1992: IEEE, pp. 25-30.
[52]M. Badran and M. Moussa, "On the design of an electrohydrodynamic ion-drag micropump," in 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04), 2004: IEEE, pp. 137-140.
[53]C. H. Chen and J. G. Santiago, "A planar electroosmotic micropump," Journal of Microelectromechanical systems, vol. 11, no. 6, pp. 672-683, 2002.
[54]Y. Takemori, S. Horiike, T. Nishimoto, H. Nakanishi, and T. Yoshida, "High pressure electroosmotic pump packed with uniform silica nanospheres," in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS'05., 2005, vol. 2: IEEE, pp. 1573-1576.
[55]H. A. Rouabah, B. Y. Park, R. B. Zaouk, H. Morgan, M. J. Madou, and N. G. Green, "Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8," Journal of Micromechanics and Microengineering, vol. 21, no. 3, p. 035018, 2011.
[56]P. Wang, Z. Chen, and H. C. Chang, "A new electro-osmotic pump based on silica monoliths," Sensors and Actuators B: Chemical, vol. 113, no. 1, pp. 500-509, 2006.
[57]E. D. Colgate and H. Matsumoto, "An investigation of electrowetting‐based microactuation," Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol. 8, no. 4, pp. 3625-3633, 1990.
[58]K. S. Yun, I. J. Cho, J. U. Bu, C. J. Kim, and E. Yoon, "A surface-tension driven micropump for low-voltage and low-power operations," Journal of microelectromechanical systems, vol. 11, no. 5, pp. 454-461, 2002.
[59]J. Lee, H. Moon, J. Fowler, T. Schoellhammer, and C. J. Kim, "Electrowetting and electrowetting-on-dielectric for microscale liquid handling," Sensors and actuators a: Physical, vol. 95, no. 2-3, pp. 259-268, 2002.
[60]Y. Yoshimi, K. Shinoda, M. Mishima, K. Nakao, and K. Munekane, "Development of an artificial synapse using an electrochemical micropump," Journal of Artificial Organs, vol. 7, pp. 210-215, 2004.
[61]H. Suzuki and R. Yoneyama, "A reversible electrochemical nanosyringe pump and some considerations to realize low-power consumption," Sensors and Actuators B: chemical, vol. 86, no. 2-3, pp. 242-250, 2002.
[62]A. Kabata, H. Suzuki, Y. Kishigami, and M. Haga, "Micro system for injection of insulin and monitoring of glucose concentration," in SENSORS, 2005 IEEE, 2005: IEEE, p. 4 pp.
[63]C. K. Byun, K. Abi Samra, Y. K. Cho, and S. Takayama, "Pumps for microfluidic cell culture," Electrophoresis, vol. 35, no. 2-3, pp. 245-257, 2014.
[64]J. Y. Sim, M. P. Haney, S. I. Park, J. G. McCall, and J. W. Jeong, "Microfluidic neural probes: in vivo tools for advancing neuroscience," Lab on a Chip, vol. 17, no. 8, pp. 1406-1435, 2017.
[65]J. G. Smits and N. V. Vitafin, "Piezo-electrical micropump," European patent EP0134614, Netherlands, 1984.
[66]Z. Ma, Y. Zheng, Y. Cheng, S. Xie, X. Ye, and M. Yao, "Development of an integrated microfluidic electrostatic sampler for bioaerosol," Journal of Aerosol Science, vol. 95, pp. 84-94, 2016.
[67]S. A. M. Shaegh, A. Pourmand, M. Nabavinia, H. Avci, A. Tamayol, P. Mostafalu, H. B. Ghavifekr, E. N. Aghdam, M. R. Dokmeci, and A. Khademhosseini, "Rapid prototyping of whole-thermoplastic microfluidics with built-in microvalves using laser ablation and thermal fusion bonding," Sensors and Actuators B: Chemical, vol. 255, pp. 100-109, 2018.
[68]M. K. Dehghan Manshadi, D. Khojasteh, M. Mohammadi, and R. Kamali, "Electroosmotic micropump for lab‐on‐a‐chip biomedical applications," International Journal of Numerical Modelling: Electronic Networks, Devices and Fields, vol. 29, no. 5, pp. 845-858, 2016.
[69]D. D. Xia and J. Bai, "Simulation study and function analysis of micro-axial blood pumps," in 2005 IEEE Engineering in Medicine and Biology 27th Annual Conference, 2006: IEEE, pp. 2971-2974.
[70]E. Zordan and F. Amirouche, "Design and analysis of a double superimposed chamber valveless MEMS micropump," Proceedings of the Institution of Mechanical Engineers, Part H: Journal of Engineering in Medicine, vol. 221, no. 2, pp. 143-151, 2007.
[71]M. Sen, D. Wajerski, and M. Gad-el-Hak, "A novel pump for MEMS applications," Journal of Fluids Engineering, Transactions of the ASME, vol. 118, no. 3, pp. 624-627, 1996.
[72]L. B. Leverett, J. D. Hellums, C. P. Alfrey, and E. C. Lynch, "Red blood cell damage by shear stress," Biophysical journal, vol. 12, no. 3, pp. 257-273, 1972.
[73]J. G. Smits, "Piezoelectric micropump with three valves working peristaltically," Sensors and Actuators A: Physical, vol. 21, no. 1-3, pp. 203-206, 1990.
[74]A. Cobo, R. Sheybani, H. Tu, and E. Meng, "A wireless implantable micropump for chronic drug infusion against cancer," Sensors and Actuators A: Physical, vol. 239, pp. 18-25, 2016.
[75]R. Sheybani, A. Cobo, and E. Meng, "Wireless programmable electrochemical drug delivery micropump with fully integrated electrochemical dosing sensors," Biomedical microdevices, vol. 17, pp. 1-13, 2015.
[76]I. Uguz, C. M. Proctor, V. F. Curto, A. M. Pappa, M. J. Donahue, M. Ferro, R. M. Owens, D. Khodagholy, S. Inal, and G. G. Malliaras, "A microfluidic ion pump for in vivo drug delivery," Advanced Materials, vol. 29, no. 27, p. 1701217, 2017.
[77]R. D. Meyer, S. F. Cogan, T. H. Nguyen, and R. D. Rauh, "Electrodeposited iridium oxide for neural stimulation and recording electrodes," IEEE Transactions on Neural Systems and Rehabilitation Engineering, vol. 9, no. 1, pp. 2-11, 2001.
[78]P. F. Johnson and L. L. Hench, "An in vitro analysis of metal electrodes for use in the neural environment," Brain, Behavior and Evolution, vol. 14, no. 1-2, pp. 23-45, 1977.
[79]K. S. Kang and J. L. Shay, "Blue sputtered iridium oxide films (blue SIROF's)," Journal of the Electrochemical Society, vol. 130, no. 4, p. 766, 1983.
[80]J. D. E. McIntyre, W. F. Peck, and S. Nakahara, "Oxidation state changes and structure of electrochromic iridium oxide films," Journal of The Electrochemical Society, vol. 127, no. 6, p. 1264, 1980.
[81]J. D. Klein, S. L. Clauson, and S. F. Cogan, "Morphology and charge capacity of sputtered iridium oxide films," Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol. 7, no. 5, pp. 3043-3047, 1989.
[82]S. F. Cogan, "Neural stimulation and recording electrodes," Annu. Rev. Biomed. Eng., vol. 10, pp. 275-309, 2008.
[83]E. Slavcheva, U. Schnakenberg, and W. Mokwa, "Deposition of sputtered iridium oxide—Influence of oxygen flow in the reactor on the film properties," Applied Surface Science, vol. 253, no. 4, pp. 1964-1969, 2006.
[84]K. Wang, C.-C. Liu, and D. M. Durand, "Flexible nerve stimulation electrode with iridium oxide sputtered on liquid crystal polymer," IEEE transactions on biomedical engineering, vol. 56, no. 1, pp. 6-14, 2009.
[85]V. K. LaMer and R. H. Dinegar, "Theory, production and mechanism of formation of monodispersed hydrosols," Journal of the american chemical society, vol. 72, no. 11, pp. 4847-4854, 1950.
[86]L. Ouattara, S. Fierro, O. Frey, M. Koudelka, and C. Comninellis, "Electrochemical comparison of IrO 2 prepared by anodic oxidation of pure iridium and IrO 2 prepared by thermal decomposition of H 2 IrCl 6 precursor solution," Journal of applied electrochemistry, vol. 39, pp. 1361-1367, 2009.
[87]S. Fierro, A. Kapałka, and C. Comninellis, "Electrochemical comparison between IrO2 prepared by thermal treatment of iridium metal and IrO2 prepared by thermal decomposition of H2IrCl6 solution," Electrochemistry communications, vol. 12, no. 1, pp. 172-174, 2010.
[88]W. D. Huang, H. Cao, S. Deb, M. Chiao, and J. C. Chiao, "A flexible pH sensor based on the iridium oxide sensing film," Sensors and Actuators A: Physical, vol. 169, no. 1, pp. 1-11, 2011.
[89]T. M. Silva, A. M. P. Simoes, M. G. S. Ferreira, M. Walls, and M. D. C. Belo, "Electronic structure of iridium oxide films formed in neutral phosphate buffer solution," Journal of Electroanalytical Chemistry, vol. 441, no. 1-2, pp. 5-12, 1998.
[90]K. Yamanaka, "Anodically electrodeposited iridium oxide films (AEIROF) from alkaline solutions for electrochromic display devices," Japanese journal of applied physics, vol. 28, no. 4R, p. 632, 1989.
[91]S. C. Mailley, M. Hyland, P. Mailley, J. M. McLaughlin, and E. T. McAdams, "Electrochemical and structural characterizations of electrodeposited iridium oxide thin-film electrodes applied to neurostimulating electrical signal," Materials Science and Engineering: C, vol. 21, no. 1-2, pp. 167-175, 2002.
[92]M. D. Obradović, B. D. Balanč, U. Č. Lačnjevac, and S. L. Gojković, "Electrochemically deposited iridium-oxide: Estimation of intrinsic activity and stability in oxygen evolution in acid solution," Journal of Electroanalytical Chemistry, vol. 881, p. 114944, 2021.
[93]Y. Zhang, M. Cao, H. Lv, J. Wei, Y. Gu, D. Liu, W. Zhang, M. P. Ryan, and X. Wu, "Electrodeposited nanometer-size IrO2/Ti electrodes with 0.3 mg IrO2 cm− 2 for sludge dewatering electrolysers," Electrochimica Acta, vol. 265, pp. 507-513, 2018.
[94]L. Ilyukhina, S. Sunde, and R. G. Haverkamp, "Electronic structure and growth of electrochemically formed iridium oxide films," Journal of The Electrochemical Society, vol. 164, no. 14, p. F1662, 2017.
[95]M. Mehdipour, S. H. Tabaian, and S. Firoozi, "Anodic electrodeposition of ligand-free iridium oxide on titanium with high mass loading and study of electrochemical treatments," Journal of Electroanalytical Chemistry, vol. 858, p. 113831, 2020.
[96]T. Nakagawa, C. A. Beasley, and R. W. Murray, "Efficient electro-oxidation of water near its reversible potential by a mesoporous IrO x nanoparticle film," The Journal of Physical Chemistry C, vol. 113, no. 30, pp. 12958-12961, 2009.
[97]D. Wu, X. Wang, and X. Wu, "A Study on the Anodic Electrodeposition of Iridium Oxide on Different Substrates," Journal of The Electrochemical Society, vol. 169, no. 9, p. 092503, 2022.
[98]M. A. Petit and V. Plichon, "Anodic electrodeposition of iridium oxide films," Journal of Electroanalytical Chemistry, vol. 444, no. 2, pp. 247-252, 1998.
[99]R. Fröhlich, A. Rpzany, J. Riedmüller, A. Bolz, and M. Schaldach, "Electroactive coating of stimulating electrodes," Journal of Materials Science: Materials in Medicine, vol. 7, pp. 393-397, 1996.
[100]N. Page, J. Lucchi, J. Buchan, A. Fones, H. Hamilton, T. Scabarozi, L. Yu, S. Amini, and J. Hettinger, "The effect of deposition parameters on microstructure and electrochemical performance of reactively sputtered iridium oxide coatings," Materials Today Communications, vol. 29, p. 102967, 2021.
[101]Y. J. Park, J. Lee, Y. S. Park, J. Yang, M. J. Jang, J. Jeong, S. Choe, J. W. Lee, J. D. Kwon, and S. M. Choi, "Electrodeposition of high-surface-area IrO2 films on Ti felt as an efficient catalyst for the oxygen evolution reaction," Frontiers in Chemistry, vol. 8, p. 593272, 2020.
[102]S. Yao, M. Wang, and M. Madou, "A pH electrode based on melt-oxidized iridium oxide," Journal of the electrochemical society, vol. 148, no. 4, p. H29, 2001.
[103]R. Sanjines, A. Aruchamy, and F. Levy, "Thermal stability of sputtered iridium oxide films," Journal of the Electrochemical Society, vol. 136, no. 6, p. 1740, 1989.
[104]S. F. Cogan, J. Ehrlich, T. D. Plante, A. Smirnov, D. B. Shire, M. Gingerich, and J. F. Rizzo, "Sputtered iridium oxide films for neural stimulation electrodes," Journal of Biomedical Materials Research Part B: Applied Biomaterials: An Official Journal of The Society for Biomaterials, The Japanese Society for Biomaterials, and The Australian Society for Biomaterials and the Korean Society for Biomaterials, vol. 89, no. 2, pp. 353-361, 2009.
[105]S. Kakooei, M. C. Ismail, and B. A. Wahjoedi, "Electrochemical study of iridium oxide coating on stainless steel substrate," International Journal of Electrochemical Science, vol. 8, no. 3, pp. 3290-3301, 2013.
[106]S. M. Gateman, O. Gharbi, N. Kieu, M. TURMINE, and V. VIVIER, "On the use of a constant phase element (CPE) in electrochemistry," Current Opinion in Electrochemistry, p. 101133, 2022.
[107]G. S. Frankel, "Fundamentals of corrosion kinetics," Active protective coatings: new-generation coatings for metals, pp. 17-32, 2016.
[108]W. C. Dautremont Smith, "Transition metal oxide electrochromic materials and displays: a review: Part 2: oxides with anodic coloration," Displays, vol. 3, no. 2, pp. 67-80, 1982.
[109]R. J. Mortimer, "Electrochromic materials," Chemical Society Reviews, vol. 26, no. 3, pp. 147-156, 1997.