臺灣博碩士論文加值系統

本研究致力於延長OLED 的壽命時間，影響壽命的因素很多，有機材料純度、槍體真空鍍、腔體裡零件潔淨度、鎢舟與鋁錠清潔度、ITO基板的清洗方式及破真空時造成的揚塵等都會影響OLED的壽命。
而臭氧氣體能有效分解腔體中耐熱膠帶與真空膠材，遇熱熔出的脂質，而這些脂質就是讓OLED壽命下降的一大原因，因此本研究使用臭氧來清潔跟空熱蒸鍍腔體，清潔後在進行OLED的製程，以提升元件效率與壽命。並與未使用臭氧清潔腔體的製程環境互相比較，發現利用臭氧清潔過的腔體製程出的OLED，不管有無使用玻璃蓋板進行封裝，其壽命都有所延長。無玻璃封裝之OLED壽命半衰期從9.93分鐘提升到34.27分鐘，有玻璃封裝之OLED壽命半衰期從34.4分鐘提升到404.65分鐘。
我們也透過使用水滴腳測試儀，去監測臭氧對腔體中基板的水滴角變化，會發現在未使用臭氧清潔時，隨著抽真空的時間，基板的水滴角也會越來越大，從進去腔體前的近乎0度到抽至2小時的15.58度，而水滴角超過五度的基板之成膜性也會不好進而影響到OLED的壽命與效率。使用過臭氧清潔的腔體中基板的水滴角，即使抽到2個小時水滴角的角度也不會超過5度，從一小時的4.51度甚至慢慢下降到3.02度，而這樣的水滴角正是讓成膜性提升的關鍵，也進而提升了OLED的壽命與效率。
本論文使用之元件結構為PEDOT:PSS(3 layers)/HATCN(10nm)/TAPC(30nm)/
Alq3(40nm)/TPBi(30nm)/LiF(3nm)/Al(150nm)，雖然HATCN有清潔與平整化的功能，但因為ITO的品質問題，我們發現了元件在封裝之後會有燒點的問題，這是因為ITO的不平整，因此在ITO較尖銳的地方，度上去的有機與金屬薄膜相對較薄，也就有了燒點的問題，最後在增加PEDOT:PSS後得到了改善。

This research is dedicated to prolonging the lifetime of OLEDs. There are many factors that affect lifetimes, such as the purity of organic materials, vacuum plating on the gun body, the cleanliness of parts in the cavity, the cleanliness of the tungsten boat and aluminum ingot, the cleaning method of the ITO substrate, and the vacuum caused by breaking the vacuum. Dust, etc. will affect the life of OLED.
Ozone gas can effectively decompose the heat-resistant tape and vacuum glue in the cavity, and the lipids that melt out when heated, and these lipids are a major reason for the decline in OLED life. Therefore, this study uses ozone to clean and empty the thermal evaporation cavity. After cleaning, the OLED process is performed to improve the efficiency and life of the device. Compared with the process environment without using ozone to clean the cavity, it is found that the life of the OLED produced in the cavity cleaned by ozone is prolonged regardless of whether it is packaged with a glass cover or not. The half-life of OLEDs without glass encapsulation increased from 9.93 minutes to 34.27 minutes, and the half-life of OLEDs with glass encapsulation increased from 34.4 minutes to 404.65 minutes.
We also use the water drop foot tester to monitor the change of the water drop angle of the substrate in the chamber by ozone. We will find that when the ozone is not used for cleaning, the water drop angle of the substrate will become larger and larger with the time of vacuuming, from The temperature before entering the cavity is close to 0 degrees to 15.58 degrees after being pumped for 2 hours, and the film-forming property of the substrate with a water drop angle exceeding 5 degrees will also be poor, which will affect the life and efficiency of the OLED. The water drop angle of the substrate in the chamber cleaned by ozone will not exceed 5 degrees even if it is pumped for 2 hours, and it will drop from 4.51 degrees in one hour to 3.02 degrees. It is the key to improve the film-forming property, and then improve the life and efficiency of OLED.
The device structure used in this paper is PEDOT:PSS(3 layers)/HATCN(10nm)/TAPC(30
nm)/Alq3(40nm)/TPBi(30nm)/LiF(3nm)/Al(150nm), although HATCN has the function of cleaning and flattening, but because of the quality of ITO, we found that the components will burn after packaging , This is because of the unevenness of ITO. Therefore, where the ITO is sharper, the organic and metal films are relatively thinner, and there is a problem of burning point. Finally, it has been improved after adding PEDOT:PSS.

摘要……………………………………………………………………i
Abstract…………………………………………………………ii
誌謝……………………………………………………………………iv
目錄……………………………………………………………………v
表目錄………………………………………………………………vii
圖目錄………………………………………………………………viii
第一章、緒論…………………………………………………1
1.1有機發光二極體簡介……………………………1
1.2研究動機……………………………………………………2
1.3文獻探討……………………………………………………3
第二章、有機發光二極體原理……………………5
2.1有機發光二極體原理………………………………5
2.1.1有機發光二極體發光機制……………………5
2.1.2電流注入理論…………………………………………6
2.1.3有機發光二極體各層結構介紹…………8
2.2 熱活化延遲螢光材料………………………………10
第三章、實驗方法與步驟…………………………………11
3.1實驗流程…………………………………………………………11
3.2陰極及陽極圖形定義製備…………………………12
3.2.1雷射雕刻基板圖形化………………………………12
3.2.2基板清洗……………………………………………………14
3.3有機層旋塗與熱蒸鍍……………………………………15
3.3.1旋塗有機層操作流程………………………………15
3.3.2熱蒸鍍有機層操作流程…………………………17
3.3.2熱蒸鍍與旋塗有機層之材料選用…………20
3.4金屬蒸鍍陰極……………………………………………………23
3.5使用臭氧清潔腔體流程………………………………26
3.6元件封裝………………………………………………………………27
3.7.1元件特性量測………………………………………………28
3.7.2元件壽命量測………………………………………………30
第四章、結果與討論………………………………………………32
4.1綠光元件製程……………………………………………………32
4.1.1基板清洗…………………………………………………………32
4.1.2元件結構…………………………………………………………34
4.1.3燒點問題…………………………………………………………36
4.1.4增加PEDOT:PSS結構…………………………………39
4.2 臭氧清潔………………………………………………………………43
4.2.1 臭氧清潔對腔體之影響…………………………43
4.2.2 臭氧清潔對元件之影響…………………………46
第五章、結論……………………………………………………………50
參考文獻……………………………………………………………………51
Extended Abstract…………………………………………53

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