臺灣博碩士論文加值系統

本研究提出利用奈米壓印技術實現表面平坦型光柵導模共振生物感測元件。我們比較兩種一維光柵耦合導模共振元件，第一種為傳統光柵結構，表面是非平坦的光柵結構波導元件，另一種是表面平坦的光柵結構波導元件，而入射光是從基板入射。這兩者的差異在檢體附著時，表面平坦導模共振元件也不會因為光柵表面不平整產生生物檢體或細胞附著不均勻的問題，模擬結果顯示表面平坦型導模共振元件的靈敏度為10⁰/RIU，為提升靈敏度我們採用低折射率材料來設計表面平坦型之導模共振光柵結構，模擬結果顯示低折射率材料能使電場分部較集中在感測的表面，使元件的靈敏度提升至20⁰/RIU。

This study proposes the use of nanoimprinting process to fabricate a flat guided-mode resonant biological sensing device. We compare two types of one-dimensional grating guided mode resonant devices. One is a traditional guided-mode resonant device structure with the grating pattern waveguide on surface. The other device has smooth surface, and the excitation light is launched into the substrate side. The flat surface guided-mode resonance device can prevent non-homogeneous attachment of biological specimens or cell which may occur on the non-flat grating surface. However, based on the simulation results, the sensitivity of the flat surface guided-mode resonance sensing device is 10⁰/ RIU. To improve the sensitivity, we propose to use a low refractive index layer in the flat surface guided-mode resonant device structure to enable electric-field distribution under resonance condition be more concentrated on the sensing surface. Simulation results show that the sensitivity of this kind device can be increased to 20⁰/RIU.

摘要………………………………………………………………i
Abstract………………………………………………………………ii
誌謝………………………………………………………………iii
目錄………………………………………………………………iv
圖目錄………………………………………………………………vi
第一章 導論………………………………………………………………1
1.1 研究動機與目的………………………………………………………………1
1.2 文獻回顧………………………………………………………………2
1.3 研究方法………………………………………………………………6
1.4 論文架構………………………………………………………………7
第二章 導模共振原理………………………………………………………………8
2.1 導模共振效應………………………………………………………………8
2.2 波導理論………………………………………………………………10
2.3 等效介質理論………………………………………………………………10
第三章 元件結構參數模擬………………………………………………………………11
3.1 光電模擬與計算軟體介紹………………………………………………………………11
3.1.1 EM Explorer………………………………………………………………11
3.1.2 GSolver………………………………………………………………13
3.2 元件設計參數探討………………………………………………………………14
3.2.1 介質折射率改變的靈敏度………………………………………………………………15
3.2.2 光柵週期………………………………………………………………18
3.2.3 波導層厚度………………………………………………………………19
3.2.4 調制深度………………………………………………………………20
第四章 表面平坦型奈米光柵導模共振元件製程………………………………………………………………21
4.1 元件製程………………………………………………………………21
4.2 實驗材料與儀器………………………………………………………………22
4.2.1 奈米壓印機………………………………………………………………22
4.2.2 聚二甲基矽氧烷（PDMS）………………………………………………………………23
4.2.3 製備中孔隙二氧化矽溶液………………………………………………………………24
4.2.4 製備二氧化鈦溶膠凝膠………………………………………………………………25
4.3 聚二甲基矽氧烷(PDMS)模仁製作………………………………………………………………27
4.4 製備中孔隙二氧化矽奈米光柵………………………………………………………………28
4.4.1 中孔隙二氧化矽光柵結構………………………………………………………………29
4.5 表面平坦二氧化鈦波導層製程………………………………………………………………30
第五章 量測系統與結果………………………………………………………………31
5.1 共振角量測系統………………………………………………………………32
5.2 外差干涉相位量測系統………………………………………………………………34
5.2.1 電光調制器原理………………………………………………………………36
5.2.2 外差干涉技術原理………………………………………………………………38
5.3 低折射率材料量測結果………………………………………………………………39
第六章 結論與未來展望………………………………………………………………41
參考文獻………………………………………………………………42
Extended Abstract………………………………………………………………44

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