臺灣博碩士論文加值系統

太陽能為再生能源之一，利用光熱轉換性能良好之太陽能選擇性吸收膜，應用於太陽能熱水系統之集熱器，可以減少環境汙染。傳統製作太陽能集熱器以黑色或深色系為主，彩色太陽能選擇性吸收膜適宜與建築物搭配，可提供太陽光熱系統更多樣的設計性及增加其使用性。
本實驗利用反應式磁控濺鍍系統濺鍍不同Si含量之CrSixN(x:2.3、6.1、11.2 at.%)，探討Si含量對結構、電性、光學性質及熱穩定性影響。以具優良光學性質與熱穩定性之CrSi6.1N薄膜作為吸收層，以Cr2O3與SiO2為抗反射層。於銅基材上製備CrSiN/Cr2O3/SiO2多層選擇性吸收膜，透過改變抗反射層厚度組合，製作多元彩色太陽能選擇性吸收膜。使用場發射式電子顯微鏡，能量散射光譜儀，X光繞射儀觀察薄膜結構、表面形貌與化學組成，以紫外光/可見光/近紅外光分光光譜儀及傅立葉轉換紅外光譜儀分別量測吸收率與熱輻射率。多層反射膜吸收率落在93.61%~96.40%，熱輻射率為0.143~0.173。顏色呈現鋼藍色、蘭紫色、青色、暗橙色、湛藍色。最後以熱穩定性測試多層選擇性吸收膜是否能在吸收率下降是否可以維持在3%以內，作為吸收膜性能穩定標準，大氣熱穩定性為300 ℃，真空可達500 ℃。

Solar energy is one of the renewable energy sources, it can reduce environmental pollution. Solar selective absorption films with good photothermal effect, solar selective absorption films usually applied to solar collector of solar water heating system. Traditionally solar collectors are mainly black or dark color, colored solar selective absorbing is suitable for matching with buildings, it provides more design and increased usability of solar thermal systems.
In this study, CrSiXN thin films with different Si contents(x:2.3、6.1、11.2 at.%) were prepared by reactive magnetron sputtering. Effect of Si content on the structure, electrical properties, optical, and high temperature stability of CrSiXN were investigated. CrSi6.1N exhibit excellent optical properties and high temperature stability applied to absorbing layer. Use Cr2O3 and SiO2 for an-tireflection layer, CrSiN/Cr2O3/SiO2 multilayer selective absorbing films deposited on Cu substrate. By changing the thickness of the an-tireflection layer to production Colored Solar Selective Absorbing Films. The thin films structure and chemical composition by using FE-SEM, EDS and XRD. The thin films of solar absorbance and thermal emittance were calculated from the deta of measured relative reflectance obtained by UV/VIS/NIR Spectrophotometer and Fourier Transform Infrared Spectroscopy. The multilayer selective absorbing films solar absorbance of these absorbers was between 93.61% and 96.40%, the thermal emittance was between 0.143 and 0.173. CrSiN/Cr2O3/SiO2 colored solar selective absorbing can display steel blue, blue purple, blue, dark orange, deep blue. Finally the multilayer selective absorbing films can be maintained within 3% of the decrease in absorption rate by thermal stability test, the abosorbing films were thermally stable at 300 ℃ in air, and 500 ℃ in vacaum.

摘要...i
Abstract...ii
誌謝...iv
目錄...v
表目錄...vi
圖目錄...viii
第一章、緒論...1
1.1 前言...1
1.2 研究動機...2
第二章、文獻探討...3
2.1 太陽能選擇性吸收膜原理...3
2.2 太陽能選擇性吸收膜之光學性質探討與量測...3
2.3 太陽能選擇性吸收膜之分類...4
2.4過渡金屬氮化物薄膜在太陽能吸收膜之發展趨勢...6
2.5彩色太陽能選擇性吸收膜...7
2.6濺鍍方式...7
2.7 薄膜成長方式...10
2.8 光學能隙計算...12
2.9 鍍層材料...12
2.10 CIE色度座標...13
第三章、實驗步驟及儀器介紹...22
3.1 實驗材料...22
3.2 製程設備與分析儀器...23
3.3 實驗製程...26
第四章、結果與討論...32
4.1 不同濺鍍功率對CrSiXN鍍膜成分結構、電性、光學性質、熱穩定性之影響...32
4.2 疊層選用介紹...53
4.3逐層堆疊吸收膜之吸收率與熱輻射率比較...61
4.4 彩色CrSiN/Cr2O3/SiO2堆疊吸收膜...64
第五章、結論...85
參考文獻...86

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