臺灣博碩士論文加值系統

現今機械手臂是智慧工廠的指標設備之一，目前機械手臂相關檢測規範主要是根據國際標準ISO 9283，而檢測的設備主要是雷射干涉儀、雷射追蹤儀，但雷射干涉儀一次只能量測一自由度誤差，而誤差又可分為位移誤差和角度誤差，因此在進行量測的過程中，為了要量測不同項目的誤差，所以得更換鏡組，相當耗費時間，而雷射追蹤儀的價錢昂貴且量測精度仍受限制(1µm以上)，所以發展一套快速檢測系統，評估機械手臂的性能。
本論文延續學長開發的三維視覺影像檢測系統，使用Charge-coupled Device搭配影像處理以及檢測物件(標準圓球)結合工具機與機械手臂，將檢測物件(標準圓球)架設在機械手臂夾爪上，藉由機械手臂將標準圓球移動至感測頭檢測範圍，透過訊號處理組進行接收各感測頭中影像擷取器所輸出訊號，搭配程式介面開發，進行角度檢測與定位誤差測量，並透過通訊連結對工具機及機械手臂的控制器上傳檢測路徑，其中包括兩點之間的直線移動、四點所構成的方形路徑及曲線路徑，透過這些路徑來檢測機械手臂五自由度的定位精度。
此系統的穩定度約為3 μm，θx及θy的檢測角度最小為0.01度，具有低成本、高精度及多自由度量測之優點。

Today's robotic arm is one of the indicator devices of the smart factory. Currently, the relevant inspection specifications for the robot arm are mainly in accordance with the international standard ISO 9283, and the detection equipment is mainly the laser interferometer and the laser tracker. The laser tracker is expensive and the measurement accuracy is still limited (1μm or more). The laser interferometer can only be used to measure an error of one axis at a time, which results time-consuming effort on changing measurement mirrors for measurement of different kinds of error, such as displacement error and angle error. Therefore, there is a need to develop a rapid detection system to evaluate the performance of the robot arm.
In this study, a three dimensional inspection system is developed according to the previous study of our research group. This system utilize Charge-coupled Device with image processing units for detecting objects (standard ball) clamped by the machine tool and robot arm. The standard sphere is clamped by the jaws of mechanical arm and moved to the sensing range of the image sensor. The received images are output by the image capturing unit and then processed by the signal processing unit.
With the lab-developed program, this system can perform angle detection and positioning error measurement, and upload the detection path to the controller of the machine tool and the robot arm through the communication link, including the linear movement between two points, the square path formed by four points and the curved path. The positioning accuracy of the five degrees of freedom of the robot arm can be obtained by analysis of the measurement results.
The stability of this system is about 3 μm, and the angular resolution of θx and θy is at least 0.01 degree, which has the advantages of low cost, high precision and multi-free measurement.

摘要......................................................................i
Abstract.................................................................ii
誌謝......................................................................iv
目錄......................................................................v
表目錄.................................................................viii
圖目錄....................................................................ix
第一章 緒論...............................................................1
1.1 前言..............................................................1
1.2 研究目的...........................................................2
1.3 文獻探討..........................................................3
1.4 論文架構..........................................................12
第二章 系統架構與說明....................................................14
2.1 系統架構 .........................................................14
2.2實驗機台................................................................15
2.2.1 五軸工具機(UX300，百德機械).......................................15
2.2.2 三軸工具機(FV56T，永進機械)........................................17
2.2.3 六軸機械手臂(R-2000IC 125L，FANUC)................................18
2.3 系統元件介紹.......................................................20
2.3.1 影像擷取器.......................................................21
2.3.2 鏡頭.............................................................23
2.3.3 衰減片(filter)...................................................26
2.3.4 光源.............................................................27
2.3.5 標準圓球 .........................................................28
2.3.6 鏡組..............................................................29
2.3.7 網路卡(Network card)..............................................30
2.3.8 繼電器組..........................................................31
第三章 量測系統介紹與校正.................................................35
3.1 三維視覺影像檢測系統對五軸工具機之架設...............................35
3.1.1 檢測系統原理與方法..................................................37
3.1.2 影像處理...........................................................43
3.1.3 系統操作介面.......................................................45
3.1.4 三維檢測模組校正[54]...............................................48
3.1.5 三維檢測模組角度測量...............................................55
3.1.6 不確定度分析[54]..................................................73
第四章 實驗流程結果與討論.................................................77
4.1 三維視覺影像檢測系統對工具機及機械手臂架設...........................77
4.1.1 檢測系統原理與方法.................................................78
4.1.2 系統操作介面......................................................80
4.2 單點重複性檢測....................................................81
4.3 兩點直線同動路徑檢測...............................................95
4.4 方形同動路徑檢測..................................................103
第五章 結論與未來展望....................................................122
5.1 結論.............................................................122
5.2 未來展望.........................................................123
參考文獻.................................................................124
Extended Abstract........................................................130

[1]H.F.F. Castro, “Dynamic calibration of the positioning accuracy of machine tools and coordinate measuring machines using a laser interferometer”, International Journal of Machine Tools & Manufacture, vol.43, pp.947–954, 2003.
[2]H.F.F. Castro, “Evaluation of the measurement uncertainty of a positional error calibrator based on a laser interferometer”, International Journal of Machine Tools & Manufacture, vol.45, pp.285–291, 2005.
[3]H.F.F. Castro, “Calibration system based on a laser interferometer for kinematic accuracy assessment on machine tools”, International Journal of Machine Tools & Manufacture, vol.46, pp.89–97, 2006.
[4]Yan Meng and Hanqi Zhuang, “Autonomous robot calibration using vision technology”, Robotics and Computer-Integrated Manufacturing ,Volume 23, Issue 4, August 2007, Pages 436-446.
[5]Ahmed Joubair,“A novel XY-Theta precision table and a geometric procedure for its kinematic calibration”, Robotics and Computer-Integrated Manufacturing, vol.28, pp.57–65, 2012.
[6]Yan Meng and Hanqi Zhuang, “Autonomous robot calibration using vision technology”, Robotics and Computer-Integrated Manufacturing ,Volume 23, Issue 4, August 2013, Pages 436-446.
[7]LiangXu and XiaominHe and XiuxiLi and MingPan, “A machine-vision inspection system for conveying attitudes of columnar objects in packing processes”, Measurement ,Volume 87, June 2014, Pages 255-273.
[8]Chien-Hung Liu, “Development of a grating based multi-degree-of-freedom laser linear encoder using diffracted light”, Sensors and Actuators, vol.181, pp.87– 93, 2014.
[9]FanYao and ChuYanli, “Study of a new vehicle detection algorithm based on linear CCD images”, Optik - International Journal for Light and Electron Optics, Volume 126, Issue 24, December 2015, Pages 5932-5935.
[10]Sainbuyan Natsagdorj and John Y.Chiang and Che-HanSu and Chih-chungLin and Cheng-yenChen, “Vision-based Assembly and Inspection System for Golf Club Heads”, Robotics and Computer-Integrated Manufacturing Volume 32, April 2015, Pages 83-92.
[11]Yaoyu Ding and Xuebiao Zhang and Radovan Kovacevic, “A laser-based machine vision measurement system for laser forming”, Measurement Volume 82, March 2016, Pages 345-354.
[12]Xuanchen Zhang and Yuntao Song and Yang Yang and Hongtao Pan, “Stereo vision based autonomous robot calibration”, Robotics and Autonomous Systems Volume 93, July 2017, Pages 43-51.
[13]PR Yoder, ER Schlesinger and JL Chickvary, “Active annular-beam laser autocollimator system”, Applied optics, vol. 14, pp. 1890-1895, 1975.
[14]J.B. BrYan , 1986, “A Simple Method for Testing Measuring Machines and Machine Tools Part 1: Principles and applications”, Precision Engineering, Vol. 4, No. 2, pp. 61-69.
[15]F. J. Schuda, “High-precision, wide-range, dual-axis, angle monitoring system,” Rev. Sci. Instrum. , 54, 1648-1652(1983).
[16]H.F.F Castro and M Burdekin, “Dynamic calibration of the positioning accuracy of machine tools and coordinate measuring machines using a laser interferometer”, International Journal of Machine Tools and Manufacture, Volume 43, Issue 9, July 2003, Pages 947-954.
[17]李龍添，2004，“微小角度量測及角定位量測系統之研製”，虎尾科技大學光電與材料科技研究所。
[18]邱祺詳，“白光光源式真直度干涉儀”， 國立台北科技大學光電工程系碩士論文，2010。
[19]Soichi Ibaraki and Tomoya Kudo and Tomoaki Yano and Toshiyuki Takatsuji and Sonko Osawa and Osamu Sato, “Estimation of three-dimensional volumetric errors of machining centers by a tracking interferometer”, Precision Engineering ,Volume 39, January 2015, Pages 179-186.
[20]Zuriani Usop and Ahmed AD Sarhan and N.A. Mardi and Md Nizam Abd Wahab, “Measuring of positioning, circularity and static errors of a CNC Vertical Machining Centre for validating the machining accuracy”, Measurement,Volume 61, February 2015, Pages 39-50.
[21]S.Ibaraki and K.Nagae,G.Sato, “Proposal of “open-loop” tracking interferometer for machine tool volumetric error measurement”, CIRP Annals,Volume 63, Issue 1, 2014, Pages 501-504.
[22]Gaoyan Zhong and Chaoqun Wang and Shoufeng Yang and Enlai Zheng and Yanyan Ge, “Position geometric error modeling, identification and compensation for large 5-axis machining center prototype”, International Journal of Machine Tools and Manufacture, Volume 89, February 2015, Pages 142-150.
[23]Soichi Ibaraki, Tomoya Kudo, Tomoaki Yano, Toshiyuki Takatsuji , Sonko Osawa and Osamu Sato, “Estimation of three-dimensional volumetric errors of machining centers by a tracking interferometer”, Precision Engineering, vol. 39, pp. 179-186, 2015.
[24]Zhenya He, Jianzhong Fu, Liangchi Zhang and Xinhua Yao, “A new error measurement method to identify all six error parameters of a rotational axis of a machine tool”, International Journal of Machine Tools and Manufacture, vol. 88, pp. 1-8, 2015.
[25]Jae-Chang Lee, Kwang-Il Lee and Seung-Han Yang, “Development of compact three-degrees-of-freedom compensation system for geometric errors of an ultra-precision linear axis”, Mechanism and Machine Theory, vol. 99, pp. 72-82, 2016.
[26]M. Summers, “Robot capability test and development of industrial robot positioning system for the aerospace industry”, Aero Tech Congress & Exhibition’ vol.144, pp.1108–1118, 2005.
[27]G. Alici, “A systematic technique to estimate positioning errors for robot accuracy improvement using laser interferometry based sensing”, Mech. Mach. Theory, vol.40, pp.879–906, 2005.
[28]M. Slamani, “Assessment of the positioning performance of an industrial robot”,Ind. Robot, vol.39, pp.57–68, 2012.
[29]日本規格協會，產業用機器人種類，2002。
[30]ISO International Standard, Manipulating industrial robots - Performance criteria and related test methods, ISO 9283, 1998.
[31]K. Lau, “Automatic laser tracking interferometer system for robot metrology”, Precision Engineering, vol.8, pp.3-8, 1986.
[32]Nicholas Krouglicof, “Optical position and orientation measurement techniques”, US4649504 A, 1987
[33]Jigien Cheny, “Positioning Error Analysis for Robot Manipulators with All Rotary Joints”, Robotics and Automation, Vol.3, pp.539-545, 1987
[34]J.P. Prenninger, Position and orientation measurement of industrial robots using laser tracking techniques in 6 degrees of freedom, Doctor Thesis, Institute of Flexible Automation, 1992.
[35]J.P. Prenninger, “Contactless Position and Orientation Measurement of Robot End-Effectors” Robotics and Automation, vol.1, pp.180-185, 1993.
[36]J.P. Prenninger, “A Laser Tracking System to Measure Position and Orientation of Robot End Effectors Under Motion”, The International Journal of Robotics , vol.13, pp.305-314, 1994.
[37]J.P. Prenninger, “Real-time contactless measurement of robot pose in six degrees of freedom”, Measurement , vol.14, pp.255-264,1995.
[38]S. Shimizu, H. S. Lee and N. Imai, “Simultaneous Measuring Method of Table Motion Error in 6 Degrees of Freedom,” Int. J. Japan Soc. Prec. Eng., Vol. 288, pp.273-274, 1994.
[39]A. Piratelli-Filho, “DETERMINATION OF STRAIGHTNESS ERRORS IN A WELDING ROBOT”, Measurement, 2000.
[40]陳雙源, “機器人之定位精度量測”,第十三屆全國自動化科技研討會, 2004.
[41]Fabricio Tadeu Paziani and Benedito Di Giacomo and Roberto Hideaki Tsunaki,“Robot measuring form errors”,Robotics and Computer-Integrated Manufacturing,Volume 25, Issue 1, February 2009, Pages 168-177.
[42]Ahmed Joubair, “A novel XY-Theta precision table and a geometric procedure for its kinematic calibration”, Robotics and Computer-Integrated Manufacturing, vol.28, pp.57–65, 2012.
[43]Guanglong Du , “Online robot calibration based on vision measurement”, Robotics and Computer-Integrated Manufacturing, vol.29, pp.484–492, 2013.
[44]A.Nubiola and I.A.Bonev, “Absolute calibration of an ABB IRB 1600 robot using a laser tracker , “ Robotics and Computer-Integrated Manufacturing”, vol.29,pp.236-245,2013.
[45]A. Joubair and I.A.Bonev, “Comparison of the efficiency of five observability indices for robot calibration”, vol.70,pp.254-265,2013.
[46]Albert Nubiola, “Absolute calibration of an ABB IRB 1600 robot using a laser tracker”, Robotics and Computer-Integrated Manufacturing, vol.29, pp.236–245, 2013.
[47]Marko Švaco and Bojan Šekoranja and Filip Šuligoj and Bojan Jerbić, “Calibration of an Industrial Robot Using a Stereo Vision System”, Procedia Engineering,Volume 69, 2014, Pages 459-463.
[48]Yuanfan Zeng and Wei Tian and WenheLiao, “Positional error similarity analysis for error compensation of industrial robots”,Robotics and Computer-Integrated Manufacturing,Volume 42, December 2016, Pages 113-120.
[49]國家實驗研究院-儀器科技研究中心, 淺談室內三維模型重建之技術, http://www.itrc.narl.org.tw/Publication/Newsletter/no115/p08.php.
[50]http://www.quaser.com/tw/products.php?mode=proDetail&cid=1481260229&pid=1480471683&topcid=1481260229.
[51]http://www.ycmcnc.com/chinese/01_products/03_detail.php?cid=1&id=14&ycm=14
[52]https://www.fanuc.eu/hr/en/robots/robot-filter-page/r-2000-series/r-2000ic-125l
[53]Renishaw，紅寶石探針(標準圓球)。
http://www.renishaw.com.tw/tw/materials--6423
[54]李在原，2016，“影像式五軸工具機智能化校正與補償系統”，國立虎尾科技大學自動化工程學系碩士論文。
[55]ISO_CD_10791-6，Machine Tools-Test conditions for machining centres-Part 6:Accuracy of speeds and interpolations.
[56]http://kcs.kcjh.ptc.edu.tw/~spt/computer/digital-image/CCD-CMOS.htm
[57]https://www.adlinktech.com/Products/Machine_Vision/Machine_Vision/Basler_ace_Series?lang=zh-hant