臺灣博碩士論文加值系統

　　在精密機械控制領域中，如何克服摩擦力所造成的精密度影響是一大關鍵。為了減少摩擦力所造成的影響，本論文研發具有摩擦力補償之精密奈米級循跡控制器，並利用DNLRX反摩擦力模型作為前饋控制，同時應用本研究所設計的積分型順滑模態、順滑模態、模糊順滑模態及類神經順滑模態四種不同架構之回授控制器來估測及補償摩擦力之總集不確定量。
　　實驗過程中，本研究將不同控制器分別進行無摩擦力補償與加入摩擦力補償互相做比較，以驗證摩擦力補償的效果。實驗結果發現所設計之控制器是有效可行的，且透過實驗結果的比較可以得知在使用不同回授控制器分別加入摩擦力補償之循跡性能較無加入摩擦力補償佳，並能有效減少其循跡誤差量。同時，類神經順滑模態回授控制器加DNLRX前饋控制之控制性能為最佳。

　　In the field of precision mechanical control, how to overcome the influence of friction force is a key issue. In order to reduce the influence of friction force, this paper developed a precision adaptive fuzzy neural sliding-mode　tracking control with friction compensation. In this study, the DNLRX inverse friction force model was used as feedforward controller, and four kinds of feedback controllers: the integral sliding-mode controller, sliding-mode controller, fuzzy sliding-mode controller and neural network sliding-mode controller were used to estimate and compensate the total uncertainty of friction and disturbances.
　　In the experiments, the different controllers were compared with each other for no friction compensation and friction compensation to verify the effect of friction compensation. The experimental results show that the designed controller is effective and feasible, and through the comparison of the experimental results, it can be known that the performance of friction compensation using different feedback controllers is better than without friction compensation and it can reduce the tracking error effectively. Meanwhile, the neural network sliding-mode feedback controller plus DNLRX feed-forward control has the best control performance.

摘要....................i
Abstract....................ii
誌謝....................iii
目錄....................iv
表目錄....................vi
圖目錄....................vii
符號表....................xi
第一章 緒論....................1
1.1 前言....................1
1.2 研究動機與目的....................1
1.3 文獻回顧....................1
1.4 論文架構....................2
第二章 實驗平台與應用軟體介紹....................3
2.1 六自由度奈米級移動平台....................3
2.2 雷射干涉儀量測系統....................5
2.3 平台回授控制系統....................7
2.4 應用軟體介紹....................8
第三章 反摩擦力模型....................9
3.1 Maxwell Slip模型....................9
3.2 模型參數的求取....................11
第四章 控制器的設計....................12
4.1 積分型順滑模態控制器....................12
4.2 順滑模態控制器....................19
4.3 模糊順滑模態控制器....................21
4.3.1 模糊控制理論介紹....................21
4.3.2 模糊順滑模態控制器設計....................26
4.4 類神經順滑模態控制器....................30
4.4.1 類神經網路控制理論介紹....................30
4.4.2 類神經網路基本架構....................31
4.4.3 輻狀基底函數類神經網路....................33
4.4.4 類神經順滑模態控制器設計....................34
第五章 實驗控制結果....................39
5.1 反摩擦力模型....................39
5.2 積分型順滑模態控制結果....................41
5.3 順滑模態控制結果....................48
5.4 模糊順滑模態控制結果....................55
5.5 類神經順滑模態控制結果....................62
第六章 結論及未來展望....................69
6.1 結論....................69
6.2 未來展望....................69
參考文獻....................70
Extended Abstract....................73
Introduction....................74
The controllers....................74
The experimental setup and results of experiment....................75
Conclusions....................77

[1]C. H. Liu, W. Y. Jywe, Y. R. Jeng, T, H, Hsu and Y, T. Li, 2010, “Design and control of a long-traveling nano-positioning stage”, Precision Engineering, Vol. 34, pp. 497-506.
[2]J. C. Shen, C. H. Wu, B. Y. Chen and W. Y. Jywe, 2014, “Control of a long-stroke precision scanning stage”, Proceedings of the 22nd Mediterranean Conference on Control and Automation, pp. 311-315.
[3]J. C. Shen, W. Y. Jywe, Q. Z. Lu and C. H. Wu, 2012, “Control of a high precision positioning stage”, Proceedings of the 7nd IEEE Conference on Industrial Electronics and Applications, pp. 918-922.
[4]J. M. Breguet, R. Perez, A. Bergander, C. Schmitt, R. Clavel and H. Bleuler, 2000, “Piezoactuators for motion control from centimeter to nanometer”, Proceedings of the 2000 IEEE/RSJ International Conference on Intelligent Robots and System, Vol. 1, pp. 492-497.
[5]K. Kawashima, T. Arai, K. Tadano, T. Fujita and T. Kagawa, 2010, “Development of coarse/fine dual stage using pneumatically driven bellows actuator and cylinder with air bearings”, Precision Engineering, Vol. 34, pp. 526-533.
[6]Y. Kim, B. Sohn, W. Youm, J. Jung, J. Lee and K. Park, 2008, “Voice coil motor nano stage with an eddy current damper”, 10th Intl. Conf. on Control, Automation, Robotics and VisionHanoi.
[7]楊櫂嘉，2012，“含摩擦力補償之奈米級循跡控制法”，國立虎尾科技大學自動化工程系，碩士論文。
[8]H. Olsson and K. J. Astrom, 2001, “Friction generated limit cycles”, IEEE Transactions on Control SystemsTechnology, Vol. 9, No. 4, pp. 629-636.
[9]C. C. De Wit, H. Olsson, K. J. Astrom and P. Lischinsky, 1995, “A new model for control of systems with friction”, IEEE Trans. on Automatic Control. Vol. 4, No. 3, pp. 419-425.
[10]F. Bender, V. Lampaert and J. Swevers, 2005, “The generalized Maxwell-slip model: A novel model for friction simulation and compensation”, IEEE Trans. On Automatic Control, Vol. 50, No. 11, pp. 1883-1887.
[11]K. J. Astrom and C. C. De Wit, 2008, “Revisiting the LuGre friction model”, IEEE Control Systems Magazine, Vol. 28, No. 6, pp. 101-114.
[12]F. Bender and J. Swevers, 2008, “Characterization of friction force dynamics”, IEEE Control Systems Magazine, Vol. 28, No. 6, pp. 64-81.
[13]L. Freidovich, A. Robertsson, A. Shiriaev and R. Johansson, 2010, “LuGre-model-based friction compensation”, IEEE Transactions on Control Systems Technology, Vol. 18, No. 1, pp. 194-200.
[14]J. C. Shen, Q. Z. Lu, C. H. Wu and W. Y. Jywe, 2014, “Sliding-mode tracking control with DNLRX model-based friction compensation for the precision stage”, IEEE/ASME Transactions on Mechatronics, Vol. 19, No. 2, pp. 788-797.
[15]K. Worden, C. X. Wong, U. Parlitz, A. Hornstein, D. Engster, T.Tjahjowidodo, F. Al-Bender, D. D. Rizos and S. D. Fassois, 2007, “Identification of pre-sliding and sliding friction dynamics: Gray box and black box models”, Mechan. Syst. Signal Process. Vol. 21, No. 1, pp. 514-534.
[16]D. D. Rizos and S. D. Fassois, 2009, “Friction identification based upon the Lugre and Maxwell slip models”, IEEE Trans. On Control Systems Technology, Vol. 17, No. 1, pp. 153-160.
[17]D. D. Rizos and S. D. Fassois, 2005, “Maxwell slip model based identification and control of systems with friction”, Proceedings of the 44th IEEE Conference on Decision and control, and the European Cintrol Conference 2005 Seville, Spain, December, pp. 4578-4583.
[18]廖威勝，2016，“以DSP為基礎之精密平台循跡控制”，國立虎尾科技大學自動化工程系，碩士論文。
[19]S. L. Chen, K. K. Tan and S. Huang, 2009, “Friction modeling and compensation of servo mechanical systems with Dual-relay feedback approach”, IEEE Transactions on Control Systems Technology, Vol. 17, No. 6, pp. 1295-1305.
[20]H. Olsson, 1996, “Control systems with friction”, Ph.D. dissertation, Dept. Automatic Control, Lund Institute of Technology, Lund, Sweden.
[21]Chen C. L., M. J. Jang and C. K. Lin, 2003, “Modeling and high-precision control of a ball-screw-driven stage”, Precision Engineering, Vol. 28, pp. 483-495.
[22]C. J. Lin, H. T. Yau and Y. C. Tian, 2013, “Identification and compensation of nonlinear friction characteristics and precision control of a linear motor stage”, IEEE/ASME Transactions on Mechatronics, 10.1109/TMECH. 1021.2202679.
[23]J. J. Choi, S. I. Han and J. S. Kim, 2006, “Development of a novel dynamic friction model and precise tracking control using adaptive back-stepping sliding mode controller”, Mechatronics, vol. 16, pp. 97-104.
[24]W. A. Kwong and K. M. Passino, 2002, “Dynamically focused fuzzy learning control”, IEEE Transactions on System, Man and Cynernatics, Vol. 26, No. 1, pp. 53-74.
[25]T. H. Liu and M. T. Lin, 1996, “A fuzzy sliding-mode controller design for a synchronous reluctance motor drive”, IEEE Transactions on Aerospace and Electronics Systems, Vol. 32, No. 3, pp. 1065-1076.
[26]許仁韋，2010，“風扇板系統之智慧型控制器設計”，國立雲林科技大學電機工程系，碩士論文。
[27]吳家鴻，2007，“六軸奈米量測機平台之研製”，國立成功大學機械工程系研究所，碩士論文。
[28]THK, http://www.thk.com/
[29]SMMC, http://www.smmc.com.tw/
[30]Renishaw, http://www.renishaw.com.tw/
[31]陳永平、張浚林，2002，可變結構控制設計(修訂版)，全華圖書科技。
[32]R. C. Dorf and R. H. Bishop, 2005, Modern Control System, 10th Edition, NJ: Pearson Education.
[33]J. J. E. Slotine and S. S. Sastrt, 1983, “Tracking control of non-linear systems using sliding surfaces with application to robot manipulators”, International Journal of Robust and Nonlinear Control, Vol. 38, pp. 465-492.
[34]林俊良，2008，智慧型控制分析與設計(修訂版)，全華圖書股份有限公司。
[35]孫宗瀛、楊英魁、鄭魁香、林建德、蔣旭堂，1996，模糊控制理論與技術，全華圖書股份有限公司。
[36]王進德，2007，類神經網路與模糊控制理論入門與應用，全華圖書股份有限公司。
[37]L. A. Zadeh, 1965, “Fuzzy set”, Information and control, Vol. 8, pp. 338-353.
[38]S. J. Huang and W. C. Lin, 2003, “Adaptive fuzzy controller with sliding surface for vehicle suspension control”, IEEE Transactions on Fuzzy System, Vol. 11, No. 4, pp. 550-559.
[39]H. Demuth, Beale and 汪惠健，2004，類神經網路設計，新加坡商湯姆生亞洲私人有限公司台灣分公司。
[40]W. S. McCulloch and W. Pitts, 1943, “A loical calculus of the ideas immanent in nervous activity”, Bulletin of Mathematical Biophysics, Vol. 5, pp. 115-133.
[41]F. Rosenblatt, 1958, “The perceptron a probabilistic model for information storage and organization in the brain”, Psychological Review, Vol.65 pp. 386-408.
[42]張斐章、張麗秋、黃浩倫，2003，類神經網路理論與實務，東華書局。