臺灣博碩士論文加值系統

通過射頻磁控濺射在玻璃上沉積氧化鋅薄膜以製備表面聲波光催化元件和紫外光探測器。使用X-ray研究了氧化鋅薄膜的晶體結構和表面形貌，利用網路分析儀測量頻率響應、傳輸信號相位、波速和元件的機電耦合係數。通過LCR阻抗分析儀觀察元件電阻和電容的變化，研究了元件光催化降解空氣中甲醛的性能。研究了指叉狀電極寬度和輸入電壓對光催化元件降解甲醛的影響。具有線寬5μm的指叉狀電極和1V的工作電壓下，表面聲波元件具有光催化降解甲醛最大的效率。

ZnO thin film was deposited on glass to fabricate a surface acoustic wave photocatalytic device and ultraviolet photodetector. ZnO thin films were deposited via radio frequency magnetron sputtering. The crystalline structure and surface morphology of ZnO thin films were examined using X-ray diffraction, scanning electron microscope, photoluminescence spectrometer and energy dispersive spectrometers. Frequency responses, phase of transmitted signals, wave velocities, and electromechanical coupling coefficients of devices were measured using network analyzer. The variations of resistance and capacitance of devices were examined by LCR meter. The performance of devices was characterized by photocatalytic degradation of formaldehyde in air. Effects of interdigital transducer width and input voltage of the devices on photocatalytic degradation of formaldehyde were investigated. The surface acoustic wave device with interdigital transducer of 5 μm wide and work voltage at 1 V has the maximum efficiency of photocatalytic degradation of formaldehyde.

摘要‧‧‧‧‧i
Abstract‧‧‧‧‧ii
誌謝‧‧‧‧‧iii
目錄‧‧‧‧‧iv
表目錄‧‧‧‧‧vi
圖目錄‧‧‧‧‧vii
1.1前言‧‧‧‧‧1
1.2本文架構‧‧‧‧‧1
1.3研究動機‧‧‧‧‧1
第二章、基礎理論‧‧‧‧‧2
2.1壓電效應‧‧‧‧‧2
2.2表面聲波‧‧‧‧‧3
2.3聲波元件‧‧‧‧‧4
2.3.1表面聲波元件‧‧‧‧‧4
2.3.2表面聲波元件相關參數‧‧‧‧‧5
2.3.3聲波波速與中心頻率‧‧‧‧‧5
2.3.4插入損耗(Insertion loss,IL)‧‧‧‧‧5
2.3.5機電耦合常數(Electromechanical Coupling Coefficient, K2)‧‧‧‧‧6
2.3.6溫度頻率係數(Temperature Coefficients of frequency,TCF)‧‧‧‧‧6
2.4氧化鋅‧‧‧‧‧7
2.5氧化鋅薄膜沉積方式‧‧‧‧‧8
2.5.1薄膜沉積方式‧‧‧‧‧8
2.5.2磁控濺鍍法原理‧‧‧‧‧8
2.5.3薄膜成長機制‧‧‧‧‧9
2.6光催化及甲醛降解‧‧‧‧‧10
2.6.1光催化‧‧‧‧‧10
2.6.2甲醛及降解機制‧‧‧‧‧11
2.7光吸收‧‧‧‧‧13
第三章、實驗步驟與分析‧‧‧‧‧14
3.1實驗流程架構‧‧‧‧‧14
3.2表面聲波元件製作‧‧‧‧‧15
3.2.1黃光微影製程‧‧‧‧‧15
3.2.2濺鍍粉靶製作‧‧‧‧‧18
3.2.3薄膜濺鍍‧‧‧‧‧18
3.3分析及量測儀器介紹‧‧‧‧‧20
3.4表面聲波元件之光催化檢測‧‧‧‧‧22
3.5實驗藥品、耗材及儀器介紹‧‧‧‧‧23
第四章、氧化鋅薄膜之分析‧‧‧‧‧25
4.1氧化鋅特性分析‧‧‧‧‧25
第五章、表面聲波元件及光催化影響‧‧‧‧‧29
5.1表面聲波元件電阻電容之量測‧‧‧‧‧29
5.2表面聲波元件相位及插入損耗之量測‧‧‧‧‧32
5.3表面聲波元件之網路分析儀檢測‧‧‧‧‧35
5.4照射紫外光之光催化影響‧‧‧‧‧37
第六章、結論‧‧‧‧‧41
參考文獻‧‧‧‧‧42

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