臺灣博碩士論文加值系統

本論文主要研究方向可分為兩個部分，第一部分是以水熱法成長氧化鋅奈米柱感測器並且進行物理特性分析，第二部分是以利用電化學測量方法測定感測器在不同酸鹼溶液中之電位差，並且利用Arduino開發版製作出即時檢測酸鹼值之無線感測系統。首先，利用RF磁控濺射在玻璃基板上沉積100nm厚的氧化鋅晶種層。通過水熱法在90℃下生長氧化鋅奈米柱6小時，最後退火400℃製作完成氧化鋅奈米柱感測器。由場發射電子顯微鏡(FE-SEM)觀察表面形態、X-光繞射儀(XRD)則可以看出樣品屬於六角纖鋅礦結構。使用鉑電極當作參考電極，利用電位法測量兩端電位差，並利用運算放大器(OPA)當作讀出電路，將感測器及參考電極放入不同酸鹼值的緩衝溶液中進行電位測定分析，pH值測量範圍為pH4、pH6、pH7、pH8、pH10。測量結果得到氧化鋅奈米柱感測器對於酸鹼值平均靈敏度為44.56mV/pH，線性度為0.983。最後利用Arduino Uno開發版用來當作數據收集端，使用Xbee模組進行數據無線傳輸，電腦端則用C#程式呈現使用者介面並且顯示出測量結果，完成無線感測網路的架設。

This research can be divided into two parts. The first part is the growth of zinc oxide nanorods (ZnO NRs) sensors with hydrothermal method and the physical characteristics analysis. The second part is to use the potentiometric electrochemical method to measure the potential difference in different pH solutions, and using the Arduino to make a wireless sensing system that detect pH in real times. First, a 100 nm ZnO seed layer was deposited on a glass substrate by RF magnetron sputtering. Subsequently, the nanorods was grown at 90℃. for 6 hours by hydrothermal method, and the ZnO nanorods sensor was completed by annealing at 400℃. Observation of surface morphology by field emission electron microscopy (FE-SEM) revealed that the ZnO nanorods were uniformly and vertically grown on the substrate. X-ray diffraction (XRD) shows that the sample is hexagonal wurtzite structures. Using a Pt electrode as a reference electrode, the potentiometric method was used to measure the potential difference between the two ends, and an OPA was used as a readout circuit. The sensor and the reference electrode were placed in a buffer solution of different pH values for potentiometric analysis. The pH measurements were pH4, pH6, pH7, pH8, pH10. The results showed that the average sensitivity of ZnO nanorods sensor was 44.56mV/pH and the linearity was 0.983. Finally, the Arduino Uno was used to collect data and the XBee module for wireless transmission. The computer side uses the C# program to present the user interface and displays the measurement results, and realized a wireless sensing network(WSN).

摘要......i
Abstract......ii
誌謝......iii
目錄......iv
表目錄......vi
圖目錄......vii
第一章 緒論......1
1.1前言 ......1
1.2研究動機......2
第二章 文獻回顧......3
2.1氧化鋅奈米材料簡介......3
2.2薄膜製程方法......5
2.3氧化鋅奈米結構之合成方式......6
2.3.1化學氣相沉積法(CVD)......6
2.3.2水溶液法 (Aqueous solution method)......7
2.3.3水熱法 (Hydrothermal method)......8
2.4 酸鹼值理論......10
2.4.1 酸鹼值電化學測量原理......10
2.4.2 延伸式閘極場效應電晶體......12
2.5無線感測網路簡介......13
2.5.1藍芽 (Bluetooth)......13
2.5.2 ZigBee......13
第三章 實驗步驟與量測設備分析......14
3.1實驗室藥品與儀器......14
3.1.1實驗藥品......14
3.1.2使用儀器......15
3.2儀器介紹......16
3.2.1射頻磁控濺鍍系統 (RF magnetic sputtering system)......16
3.2.2場發射掃描式電子顯微鏡 (Field Emission Scanning Electron Microscopy, FE-SEM)......18
3.2.3 X射線繞射儀(X-ray diffraction, XRD)......19
3.2.4光致發光(Photoluminescence, PL)......20
3.2.5 Arduino Uno Rev3 開發板......21
3.2.6 XBee無線傳輸模組......22
3.3實驗步驟......23
3.3.1基板清洗......23
3.3.2氧化鋅晶種層製程......24
3.3.3氧化鋅奈米柱及氧化鋅薄膜生長......25
3.3.4氧化鋅奈米柱及氧化鋅薄膜物理特性分析......27
3.3.5氧化鋅奈米柱及氧化鋅薄膜酸鹼值電性特性分析......27
3.3.6氧化鋅奈米柱酸鹼感測器WSN實作......28
第四章 結果與討論......29
4.1氧化鋅奈米柱與薄膜之物性分析......29
4.1.1氧化鋅奈米柱、薄膜形貌分析......29
4.1.2 X-ray繞射儀之氧化鋅奈米柱分析......32
4.1.3光致發光之氧化鋅奈米柱分析......34
4.2氧化鋅奈米柱、薄膜酸鹼值感測器電性分析......35
4.2.1氧化鋅酸鹼值感測器測量......35
4.2.2酸鹼值靈敏度比較......36
4.2.3元件重複性測試分析......38
4.3 氧化鋅奈米柱無線感測網路實作結果......40
4.3.1電路板製作及焊接......40
4.3.2 Arduino Uno端感測器數據收集程式流程......42
4.3.3 PC端使用者介面程式流程......43
4.3.4氧化鋅奈米柱酸鹼感測器WSN架設......45
第五章 結論......47
5.1結論......47
5.2未來展望......47
參考文獻......48
Extended Abstract......52

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