臺灣博碩士論文加值系統

本研究使用迴轉式超音波(RUM)加工機，對氧化鋯及藍寶石水晶玻璃進行銑削及鑽孔實驗，加工法分別採直線銑削，擺線銑削與啄鑽工法。主要調查品質為脆斷長度(BCL)、表面粗糙度(SR)、最大材料移除率(MRR)及工具磨耗壽命等。主要使用參數為主軸轉速、進給速率、每層加工深度、刀具型式、刀具粒徑及振幅功率。本研究採田口法規劃實驗設計，找出優化RUM之加工參數組合並完成驗證實驗；發現磨棒型式及粒徑的大小，對於以上加工品質有極大影響。本文提出新設計三種刀具其中螺旋磨棒適於粉屑較多的氧化鋯材料進行銑削加工，經優化之擺線切削參數可得最細表面粗糙度Ra0.045μm，直槽磨棒則適於對脆斷問題較明顯的藍寶石水晶玻璃加工，經優化之側銑加工參數，可得最小平均脆斷長度為36.68μm。鑽削刀具由市售平頭磨棒及圓頭磨棒調查發現其脆斷問題嚴重，本文也提出新設計錐頭磨棒；實驗結果能有效改善脆斷長度最小至20.5μm。使用高效率鑽孔之優化參數，建議採深切慢進給(切深0.1mm/層，F10mm/min)最快單孔可在15秒內加工完成1mm藍寶石的孔深。另本研究發現使用工件之表層犧牲材可明顯改善脆斷問題，更明確地，犧牲材凝固後本身愈硬而使切削阻力越大者，則鑽削後脆斷品質的改善效果愈佳。其次，由切削阻力觀察，長路徑銑削後因磨棒刀具耗損切削力會逐漸提升，其中以Z軸向力量提升幅度最大，其原因為刀具底部鑽石粒大幅掉落，發生基材與工件摩擦與撞擊而使切削阻力迅速增加。另外，直線銑削力處於穩定且不間斷，擺線切削力呈現為間歇起伏，因間歇的研磨使磨棒負荷較輕，並獲得冷卻間隔因而對於磨棒壽命有效提升。本研究又針對無超音波加工NoRUM、自動追頻超音波RUM(19~21kHz)、高頻超音波HRUM(29~31kHz)調查銑削阻力，其中RUM切削力最小，其次HRUM，無超音波切削切削力量最大。另採深切慢進與犧牲材輔助可明顯降低鑽削力，三種犧牲材隨硬越大，其鑽削力由47.5N 降至23.5N。最後本文整合實驗數據提出特定硬脆材料加工之優化參數組合，做為運用RUM於粗、精加工時達到高效能與高品質表面之依據，另結合刀具磨耗特性研究與延長刀具壽命之建議，可大幅節省現場測試加工時間與成本。

This thesis is aimed at optimization of operational conditions of Rotary Ultrasonic assisted Machining (RUM) spindle applied to the milling and drilling of ZrO2 and sapphire crystal. The key experiment quality includes brittle collapse length (BCL), surface roughness (SR), and material removal rate (MRR) and abrasive tool’s life. Control parameters involve spindle speed, feed rate, cutting depth per layer, tool type, grit size and amplitude of RUM (denoted by excitation power). By using Taguchi methods, milling tests by traditional linear and cycloidal milling paths, and drilling by pecking cycles are conducted. The qualities experiments reveal the tool type and grit size of diamond tools dominate the processing quality. Three types of tools are designed in this study, in which, helical abrasive tool and straight flute tool are designed for milling and taper tool is for drilling, respectively. It is found helical tool is more suitable to ZrO2 milling, and the finest SR 0.04 μm Ra is achieved with optimized conditions and cycloidal milling. But straight tool is better for lateral milling of sapphire; the finest BCL of 36.68 μm is achieved with optimized conditions. Compared to those severe drilling BCL conducted by commercial cylinder tool or ball-head tool, the novel proposed 0.8 mm taper tool improves to better BCL of 20.5μm. With the optimized combination of federate 15 mm/min and cut depth 0.1 mm/layer, only 15 seconds is needed for drilling through each single hole of 1.0 mm thick of sapphire crystal. Three sacrificial materials are investigated, and it is concluded harder sacrificial can improve BCL more significantly. Furthermore, this study investigates RUM’s milling resistance and the drilling thrust by a 6-axes load cell. Long term milling path reveals cutting force arise gradually as the tool wears, in which the increasing rate of Z force presents the largest one resulting from worn-out of diamond grits at tool end and succeeded by friction. It is also found cutting force of cycloidal path presents intermittent fluctuation and smaller resistant than conventional linear path, therefore, the tool life is prolonged with sufficient coolant flushing. In this study, milling force without vibration assistance (No-RUM), with self-tracking ultrasonic vibration RUM(19~21kHz), and with high frequency vibration HRUM (29~31kHz) are also compared. Self-tracking RUM resulted in the smallest cutting force, while No-RUM presents the biggest milling resistance. Moreover, various sacrificial can effectively suppressed drilling force from 47.5 N to 23.5 N according to their hardness. Finally, the proposed designs and quality experiments confirm that the optimization conditions for roughing and finishing of brittle materials by direct-coupled RUM are effective. Combining with the force study and suggestion means for prolonging tools life, the consuming time and machining cost can be significantly reduced through this investigation.

摘 要 I
ABSTRACT II
致謝 IV
目錄 V
表目錄 VII
圖目錄 X
符號說明 XV
第一章 緒論 1
1-1前言 1
1-2文獻回顧 3
1.3 研究動機及目的 10
1.4 本文架構 12
第二章 基本原理介紹 13
2.1 超音波加工原理 13
2.1.1 超音波加工的材料去除機制 14
2.1.2 超音波錐體及喇叭桿的種類 14
2.1.3 超音波振盪器 15
2.2磨削理論 15
2.2.1 硬脆材料受壓印的特性 16
2.2.2 硬脆材料-加工機制過程 17
2.2.3 鑽石磨粒磨削中切刃之變化 18
2.3 旋轉超音波加工過程(RUM) 19
2.3.1 迴轉式超音波(RUM)與傳統式超音波加工(USM)的優缺點 19
2.4田口方法(TAGUCHI METHODS) 20
2.5材料移除率及刀具壽命及切線速度說明 27
2.6 銑削加工-擺線加工法 29
2.7 鑽削加工-啄鑽加工法選用 29
第三章 實驗設備與方法 31
3.1 實驗設備 31
3.2 實驗材料 38
3.3實驗規劃 41
3.3-1實驗方法 41
3.3-2實驗步驟 41
3.3-3實驗因子設定 42
3.3-4實驗說明 43
3.4 實驗流程 47
3.5實驗品質定義 49
3.5-1脆性材料脆斷長度量測 49
3.5-2脆性材料表面粗糙度量測及切線速度換算 50
3.6實驗參數總表 52
第四章 銑削實驗結果 53
4.1氧化鋯參數調查- 53
4.1-1側銑實驗結果 53
4.1.2改善氧化鋯側銑參數實驗 61
4.2藍寶石水晶玻璃參數調查 69
4.2-1側銑參數實驗 69
4.2-2磨棒型式比較與犧牲材料輔助實驗 73
4.3氧化鋯槽銑實驗 81
4.3-1氧化鋯槽銑固定切寬對於表面粗糙度影響 83
4.3-2氧化鋯槽銑固定轉速對於表面粗糙度影響 84
4.3-3氧化鋯槽銑使用超音波下改變轉速及切削間距對於表面粗糙度影響 85
4.4材料移除率調查 87
4.4-1氧化鋯槽銑加工材料移除率調查 87
4.4-2槽銑實驗輔助田口法調查最大材料移除率 89
4.4-3槽銑實驗輔助切削力計調查最大材料移除率 96
4.5銑削實驗總結 98
第五章 鑽孔實驗結果 99
5.1氧化鋯參數實驗 100
5.2藍寶石水晶玻璃參數實驗 104
5.2-1磨棒型式對鑽削脆斷長度影響 104
5.2-2磨棒粒徑對鑽削脆斷長度影響 111
5.2-3鑽削輔助犧牲材料加工及新設計刀具實驗 116
5.3鑽削實驗總結 121
第六章 切削力量調查實驗結果 122
6.1銑削力量觀察 122
6.1-1銑削實驗力量調查 125
6.2鑽削力量 134
6.2-1氧化鋯鑽孔調查 134
6.2-2藍寶石水晶玻璃鑽孔調查 137
6.3鑽削與銑削力小結 141
第七章 刀具磨耗調查結果 142
7.1磨棒銑削後磨耗現象 142
7.2磨棒鑽削後磨耗現象 150
7.3磨棒調查結論 154
第八章結論 155
未來展望 157
參考文獻 158
附錄 161
簡歷 179

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