臺灣博碩士論文加值系統

本文針對微小模穴表面光製提出創新的製程與研究。一般製作微模仁的方式常使用微放電加工法，但微放電加工後表面會產生再鑄層與放電坑，嚴重影響凹孔表面品質，無法以微放電加工後使用，必定還需要其他方式修補其缺陷。因此，本研究提出於微放電加工機上發展純去離子水電解加工完成模穴，並以純去離子水結合碳化鎢電極與複合氧化鋁粉沉積工具電解進行微模穴加工之比較，而電解加工優點為加工後不會產生放電坑、無電極消耗、加工後的表面粗度較佳，純去離子水為極易取得且環保之電解液，使用在微放電加工機上低能量之電晶體切換放電源，可以低成本直接加工微模穴與微槽。在復合氧化鋁粉電解方面，為在去離子水電解液中添加氧化鋁粉末，使電解的同時氧化鋁粉會因靜電力沉積在電極上，使電解加工同時，也有氧化鋁固定磨粒之研磨之效果。
本實驗方法先使用微放電機台與線放電研削機構整修整出直徑0.35mm之球頭電極，其次於新設計之槽式電解液循環機構，針對經熱處理研磨後奧地利M333模具鋼進行電解加工。在實驗規劃中分別進行以純去離子水電解，與複合氧化鋁粉電解，探討其微凹坑加工形貌與表面粗度，在純去離子水方面發現使用進給速度30μm/min再搭配電流50mA與脈寬0.2μs能有較佳之形貌及粗糙度，相較於煤油放電加工，去離子水電解加工粗度能優於放電加工60%。在氧化鋁沉積實驗可得知、氧化鋁濃度15g/l、電極轉速500rpm時氧化鋁沉積為最大，另外搭配氧化鋁粉之複合氧化鋁磨粒電解加工實驗，結果顯示使用電極轉速500rpm，進給速度30μm/min電流50 mA與脈寬0.4μs能有較佳微模穴表面形貌達表面粗糙度Ra 0.4μm 面銑削方面，則使用去離子水電解拋光可完成0.01mm深之0.2×0.2 mm方形微模仁，也可以採分層加工達0.2×0.1×0.1mm之銑槽，並同步達Ra 0.227μm之微電解光製表面。

This thesis proposes an innovative elector-polishing process and research schemes aiming at surface polishing of micro mold’s cavity. Generally, fabricating micro mold inserts adopts micro electrical discharge machining (micro-EDM) in the industries. However, after discharging, works surface remains the recast layer and discharge crater, which results in severe impact on the quality of surface integrity. It needs other procedures and more time to mend the defect. Therefore, this research proposes a novel electrolysis polishing (Electro-Polishing, EP) with pure deionized water on micro-EDM machine and fabrication of the cavity profile simultaneously. The processes adopt tungsten carbide as tool electrode, and M333 tool steel from Austria is adopted as work-piece material. The advantages of electrolysis are that it will not produce discharge crater, nor tool electrode consumption, but better surface roughness than EDM. Pure deionized water is an environmentally friendly electrolyte and it is very liable to get. Moreover, the transistor type switching power supply of micro-EDM can cut down the cost of conventional electrochemical machining (ECM) for micro-cavity.
First of all, the experiment employed a wire electrical discharge grinding (WEDG) mechanism to produce a ball-nose tool electrode with 0.35 mm diameter, then, carried on electrolysis in a new designed electrolyte circulation tank. The experiments were conducted by electrolysis with pure deionized water, and electrolysis with Al_2 O_3 mixed water, respectively, and comparison on micro-cavity profile and surface roughness were investigated. For electrolysis with 〖Al〗_2 O_3 powder, mixing alumina powder with deionized water, the alumina particles will be deposited onto the micro-tool and be used as fixed abrasive for grinding at the same time during electrolysis. By employing the 30 μm/min feed-rate with 50mA current and 0.2μs pulse-width in pure deionized-water electrolysis, it results in the best profile and surface roughness in variable operation conditions. As compared with conventional micro-EDM in kerosene, the work’s surface roughness by pure water electro-polishing is superior to about 60% of Ra roughness. From electrolysis polishing with mixed alumina powder, the highest alumina deposition is achieved with 15g/l of concentration and 500 rpm of spindle speed. In addition, by combining hybrid electrolysis machining with composite alumina powder and grinding with alumina abrasives, with the conditions employing 500 rpm, associated with 30μm/min feed-rate, 50mA current and 0.4μs pulse-width results in better profile and surface roughness of Ra 0.4 μm. Furthermore, hybrid electro-polishing with ECM milling by using deionized water achieves micro square insert 0.2 x 0.2 mm with depth of 0.01 mm with integrated surface. A slot with 0.2 x 0.1 with depth of 0.1 mm could also be achieved by ten layers of such a hybrid micro-ECM milling and electro-polishing scheme simultaneously, and the typical roughness of the finished bottom is Ra 0.227 μm.

內容
摘要.....iv
ABSTRACT.....v
致謝.....vii
目錄.....viii
圖目錄.....xi
表目錄.....xv
符號說明.....xvi
第一章 緒論.....1
1.1前言.....1
1.2文獻回顧.....2
1.3研究目的與方法.....10
1.4本文架構.....11
第二章 原理與沿革.....12
2.1放電加工.....12
2.1.1放電加工沿革.....12
2.1.2放電加工原理.....12
2.1.3微放電加工.....14
2.1.4放電加工參數影響.....15
2.1.5放電迴路.....17
2.1.6放電能量之計算.....19
2.2複合微放電研磨原理.....20
2.3電化學加工與電解拋光.....22
2.3.1電化學加工.....22
2.3.2電解拋光.....22
2.4電泳原理與氧化鋁電泳吸附機制.....25
2.5氧化鋁的吸附行為.....26
第三章 實驗設備與規劃.....28
3.1實驗設備.....28
3.1.1微放電加工機系統.....28
3.1.2高速主軸.....30
3.1.3線上刀具電極直徑量測.....31
3.1.4自製電解拋光系統.....31
3.1.5超音波清洗槽.....33
3.1.5檢驗設備.....33
3.1.5.1示波器與衰減器.....33
3.1.5.3精密電子天平.....34
3.1.5.4掃描式電子顯微鏡.....35
3.1.5.5高頻電流探頭.....35
3.1.5.5 雷射共軛焦顯微鏡.....35
3.1.6實驗材料.....36
3.1.6.1實驗工件.....36
3.1.6.2電極材料.....38
3.1.6.3氧化鋁粉.....38
3.1.6.4電解液.....39
3.1.7實驗流程.....41
3.3實驗方法.....42
3.3.1球形刀具電極修整.....42
3.3.2去離子水(DI-Water)電解加工實驗.....43
3.3.3電泳沉積實驗.....44
3.3.4複合氧化鋁電解加工實驗.....45
第四章 電解拋光與複合加工結果.....47
4.1刀具形貌對電解加工之影響.....47
4.2 去離子水(DI-Water)電解加工實驗.....48
4.2.2電解加工電流大小加工之影響.....51
4.2.3 脈衝時間 Ton對電解加工影響.....54
4.2.4進給速度對電解加工影響.....56
4.2.6電極消耗比對實驗.....59
4.3複合氧化鋁粉電解加工實驗.....62
4.3.1純水複合氧化鋁電解之電泳現象.....62
4.3.2純水複合氧化鋁粉電解實驗.....68
4.4 小 結.....81
第五章 結果分析與電解銑削應用.....84
5.1 去離子水(DI-Water)電解加工與複合氧化鋁電解加工之比較.....84
5.2 DI-Water電解銑削開槽(ECM-milling)實驗.....88
5.3複合氧化鋁粉電解銑削開槽實驗.....91
5.4 DI-Water電解同步面銑削技術.....92
5.5 DI-Water電解深槽銑削加工.....95
第六章 結論.....98
6.1去離子水(DI-Water)電解拋光微球穴.....98
6.2 在純水ECM中複合氧化鋁粉電解拋光.....99
6.3 微電解銑削同步達成光製表面.....100
參考文獻.....101
作者簡歷.....104

1.I. M. Crichton, J. A. McGeough, 1985, “Studies of the discharge mechanisms in electrochemical arc machinin” Journal of Applied Electrochemistry,Vol. 15,pp. 113-119.
2.Biing HwaYan,Sung Long Chen, 1994, “Characteristics of SKD11 by cpmplex process of electrical discharge machining using liquid suspended with alumina powder”, J.Japan Inst. Metals 58, No. 9,pp. 1067-1072.
3.K.Furutani, A.Saneto,H.Takezawa,N. Mohri, H.Miyake, 2001, “Accretion of titanium carbide by electrical discharge machining with powder suspended in working fluid”, Precision Engineering,Journal of the International Societies for Precision Engineering and Nanotechnology 25, pp.138–144.
4.張耿維，2003， “磁力研磨與電解磁力研磨之拋光特性研究”，國立中央大學，碩士論文。
5.許俊傑，2004，用電泳沉積Al2O3粉末對微能量放電加工表面拋光的基礎研究，國立中央大學，碩士論文。
6.Malathy Pushpavanam , H. Manikandan , K. Ramanathan,2003“ Preparation and characterization of nickel–cobalt-diamond electro-composites by sediment co-deposition”, Surface & Coatings Technology 201 6372–6379.
7.B. Bhattacharyya , J. Munda, 2003, “Experimental investigation on the influence of electrochemical machining parameters on machining rate and accuracy in micromachining domain”, International Journal of Machine Tools & Manufacture 43 1301–1310.
8.Li Yong a, Zheng Yunfei , Yang Guang , Peng Liangqiang, 2003, “Localized electrochemical micromachining with gap control”, Sensors and Actuators A 108 144–148.
9.蔡清展，2005，“放電加工液中添加粉末對放電波形的探討及其加工影響”，國立台灣大學，碩士論文。
10.羅亦琥，2008，“應用放電複合製程之微凹型球面的拋光研究”，國立中央大學，碩士論文。
11.蔡智凱，2010，“加工液中添加鉬粉及氧化鋁粉對放電加工表面之探討”，私立南台科技大學，碩士論文。
12.D. Zhu , Y.B. Zeng, Z.Y. Xu, X.Y. Zhang, 2011 , “Precision machining of small holes by the hybrid process of electrochemical removal and grinding”, CIRP Annals -Manufacturing Technology 60, 247–250.
13.張嘉鴻，2013，“線上同步微放電與微研磨複合製程”，國立高雄應用科技大學，碩士論文。
14.Minh Dang Nguyen, Mustafizur Rahman, Yoke San Wong, 2013 ,“Transitions of micro-EDM/SEDCM/micro-ECM milling in low-resistivity deionized water”, International Journal of Machine Tools & Manufacture 69, 48–56.
15.Yang CK, Cheng CP, Mai CC, 2010 “Effect of surfaceroughness of tool electrode materials in ECDM perfor-mance”, Int J Mach Tool Manu 50, 1088–1096
16.Se Hwan Choi, Bo Hyun Kim b, Hong Shik Shin , Do Kwan Chung , Chong Nam Chu, 2012 , “Analysis of the electrochemical behaviors of WC–Co alloy for micro ECM”, Journal of Materials Processing Technology 213, 621–630.
17.張祐福，2014，製備鎳-鈷合金電鍍之鑽石微刀具與精微同步放電研磨應用，高雄應用科技大學，碩士論文。
18.井上潔 原著，黃錦鐘 譯，1998，放電加工，高立圖書有限公司。
19.孔慶准，1997，特種加工，同濟大學出版社。
20.黃重銓，2010，“Ni/cBN複合電鍍製程與性能探討”，國立高雄應用科技大學，碩士論文。
21.余奕勳，2008，“放電磨削於鎳基合金Inconel718之研究”，國立雲林科技大學機械工程研究所，碩士論文。
22.P. Koshy, V.K. Jain, G.K. Lal, 1996, “Mechanism of material removal in electrical discharge diamond grinding”, International Journal of Machine Tools and Manufacture 36, pp.1173-1185.
23.K.M. Shu, G.C. Tu, 2003, “Study of electrical discharge grinding using metal matrix composite electrodes”, Journal of Machine Tools & Manufacture, vol.43, pp.845–854.
24.于芝蘭，1990，金屬防護工藝原理，國防工業出版社。
25.Arthur W. Adamson, Alice P. Gast, 1997, “Physical Chemistry of Surfaces”, John Wiley & Sons Inc.
26.陳紹維，2007，“利用微細放電法修整電極與微細孔加工研究，國立雲林科技大 學，碩士論文。
27.張渭川，1990，圖解放電加工的結構技術，第二版，台灣臺北，全華科技圖書股份有限公司。