臺灣博碩士論文加值系統

本論文中，以自製的鋅擴散鈮酸鋰相位調制器，搭配內差干涉術，在結合LabVIEW程式平台，發展出簡單的流體光學感測系統，以流動的液體做即時的濃度與流速的監測，同時，也探討不同結構的感測器與量測原理其特性差異。
為了得到最佳的液體量測動態範圍，利用不同的感測器結構，利用蠕動幫浦將流體的液體，經由感測器上之接管通入流體，開發出不同的流體監測系統:如光雙折(BR)流體量測原理，以不同的雙折流體感測器(KTP、LN)，探討其量測特性；如利用不同液體折射率所產生之位移量，搭配流體位移感測器(FDS)，偵測流體濃度變化；如反射式極化旋轉(RPR)量測原理，搭配雙通道架構，同時比較量測RPR及BR原理之特性。除了液體濃度量測之研究外，也探討斜向入射正交極化相位變化在流速量測之應用。
在液體濃度量測中，為了驗證系統在化學溶液濃度量測之應用，也將不同濃度化學溶液如鹽酸(HCL)、雙氧水(H2O2)，注入雙折流體感測器中，也成功驗證KTP感測材料可以抗腐蝕之特性，也初步驗證可再惡劣環境使用之優異特性。

In this thesis, a homemade Zn-indiffused lithium niobate phase modulator is proposed for the applications of an optical homodyne interferometer, and the data acquisition and the demodulation of phase signal is performed through LabVIEW-based platform. A simple fluidic optic instrument is proposed to dynamic monitor the concentrations and flow rates of fluidic medium. Moreover, the different designs of optical sensors and principles are explored to compare the difference between the measurement performances.
There are various designs are proposed and evaluated to optimize the dynamic range by considering the structures of sensor. The liquid is delivered into the sensor through the channels of outlet and inlet driving by a tubing pump, link to Silicone hoses for sensors. There are three different kinds of sensors have been successfully demonstrated for the fluidic measurements. For examples: a birefringence refraction (BR) fluidic sensors using different plate (LN and KTP) are evaluated for comparing the measurement performances; a fluidic displacement sensor (FDS) based on a refraction induced displacement under different refractive index is proposed to monitor the fluid concentrations; In a reflective polarization rotation (RPR) measurement, a dual-channel optic phase measurement instrument is studied to compare the measuring characteristics between the RPR and BR channels. In addition to liquids’ concentration measurements, a flow rate measurement also has been successfully achieved by measuring the phase variation of the obliquely incident probe light in the flow channel.
In the liquid concentration measurements, the fluidic solutions of HCL and H2O2 were injected into the BR flow cell to test the system capability for measurements of chemical solutions. The results show that the KTP sensor has the chemical resistance property with the potential to be used in harsh environments.

摘要
Abstract
誌謝
目錄
表目錄
圖目錄
第一章 緒論
1.1研究背景
1.2文獻回顧
第二章 基本原理
2.1鈮酸鋰晶體特性
2.1.1鈮酸鋰電光特性
2.1.2 鈮酸鋰之光折效應
2.2磷酸氧鈦鉀晶體特性
2.3光雙折感測原理
2.4旋轉角量測原理
2.5流體濃度感測器原理
2.5.1光雙折感測器
2.5.2反射式極化旋轉感測器
2.5.3流體位移感測器
2.6波導相位調制器
2.6.1光學內差干涉系統
第三章 相位調制器製程與量測
3.1相位調制器製程步驟
3.1.1晶片切割
3.1.2清洗基板
3.1.3光阻塗佈
3.1.4軟烤
3.1.5曝光
3.1.6顯影
3.1.7硬烤
3.1.8鍍膜
3.1.9掀離
3.1.10熱擴散
3.1.11研磨
3.1.12導光量測
3.1.13電極層與保護層製作
3.2相位調制器量測
3.2.1 Vπ量測
3.2.2單通道穩定度量測
第四章 流體光學感測系統開發及應用
4.1光雙折流體量測系統
4.1.1光雙折感測器
4.1.2光雙折流體量測系統架構
4.1.3化學溶液量測
4.2位移式流體量測系統
4.2.1流體位移感測器
4.2.2微位移感測器量測
4.2.3位移式流體量測系統架構
4.2.4 液體濃度量測
4.2.5模擬與實際量測結果
4.2.6 光點量測
4.3反射式極化旋轉流體量測系統
4.3.1反射式極化旋轉感測器
4.3.2反射式極化旋轉流體量測架構
4.3.3敏感角量測
4.3.4液體濃度量測
4.4流體量測系統結果與討論
4.4.1相位量測結果
4.4.2液體切換
4.4.3動態量測範圍
4.5流速量測系統
4.5.1流速感測器
4.5.2流速量測系統架構
4.5.3流速量測結果
4.5.4變速量測
第五章 結論與展望
5.1結論
5.2展望
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