臺灣博碩士論文加值系統

我們利用NI(National Instruments) LabVIEW人機介面軟體，開發一個具有相位解纏繞、及時、長時間監測的相位量測系統，用來量測鈮酸鋰相位調制器，因光折現象所造成的相位飄移。透過系統穩定性測試，我們驗證所開發之光學量測系統在最佳化條件下，可自動偵測出相位變化相關資訊。隨後進一步應用於量測鈦與鋅之金屬擴散相位調制器之光折特性，量測出結果指出，鋅擴散相位調制器比鈦擴散相位調制器具有更優良的光折穩定度，成功實現利用儀器來量測相位調制器因光折效應所產生的相位飄移的概念。
另外可利用LabVIEW人機介面軟體之高度擴充性，發展出多通道量測平台，如：雙通道及三通道相位量測系統。雙通道相位量測系統，可監測加溫及未加溫之待測物，對相位變化之影響及相位調制器之光折穩定度。三通道相位量測系統，可監測待測物對相位變化之影響，及水平、垂直極化強度之變化。
本論文研究初步提供一具有彈性擴充且系統整合的量測平臺，後續將可進行更廣泛的光學量測應用。

We develop a phase measurement system that has capabilities of phase unwrapping, real-time, and long-term monitoring based on the NI (National Instruments) LabVIEW platform. The measurements of phase-drift caused by a photorefractive effect in a lithium niobium phase modulator were performed in the proposed instrument. According to the systematic test on measurement stability, we prove that the measurement system can automatically detect the phase variations. Moreover, the photorefractive characteristics of metallic titanium and zinc in-diffused phase modulators were evaluated afterward. The results show that the photorefractive stability of zinc in-diffused phase modulators is better than that of titanium in-diffused phase modulators. Finally, it is successful to measuring the phase drift caused by photorefractive in phase modulator using the developed instrument.
In addition, the multi-channel measurement platform also successfully demonstrated based on the high expansion of LabVIEW software. For instance: two-channel and three-channel phase measurement systems. In the two-channel system, it can measure phase-retardation variations of a reflected light from the surface of a device under test with heating or without heating conditions. Besides, the photorefractive stability of a phase modulator can be monitored during measurement period. Meanwhile, the phase retardations and amplitudes between horizontal and perpendicular polarizations can be obtained using the three-channel measurement system.
This study offers a measurement platform with flexibility on the system expansion and integration, which can provide more applications of optical metrology in the near future.

摘要................................................................iv
Abstract............................................................v
誌謝................................................................vi
目次...............................................................vii
表目錄..............................................................ix
圖目錄...............................................................x
第一章 緒論..........................................................1
1.1 研究動機.....................................................1
1.2 鈮酸鋰晶體特性................................................2
1.3 電光效應.....................................................3
1.4 光折效應.....................................................4
第二章 理論架構......................................................9
第三章 相位調制器製程................................................12
3.1 晶片切割....................................................12
3.2 波導層圖形定義...............................................12
3.3 電極層圖形定義...............................................18
第四章 量測平臺程式建立..............................................21
4.1 NI LabVIEW簡介..............................................21
4.2 量測平臺建立流程.............................................21
4.2.1 內建訊號模擬...........................................22
4.2.2 實際訊號之接收.........................................24
4.2.3 相位變動值即時顯示......................................24
4.2.4 波導相位飄移量測系統....................................26
第五章 實驗結果.....................................................28
5.1 系統穩定性測試...............................................29
5.1.1 β值造成之影響..........................................29
5.1.2 AC電壓改變之影響.......................................30
5.1.3 AL轉動角度改變之影響....................................31
5.1.4 燈光對量測結果之影響....................................31
5.1.5 操作頻率之影響.........................................32
5.1.6 取樣率設定.............................................33
5.2 相位調制器晶片穩定性測試......................................35
5.2.1 相位飄移量測...........................................35
5.2.2 長時間操作.............................................38
第六章 多通道量測系統................................................40
6.1 基本雙通道相位量測系統........................................40
6.2 雙通道量測系統(含溫度資訊) ...................................43
6.2.1 量測目標建立...........................................43
6.2.2 溫度變化對相位之影響....................................46
6.2.3 表面鍍膜對相位之影響....................................50
6.3 三通道量測系統...............................................53
第七章 結論.........................................................57
參考資料............................................................59

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