臺灣博碩士論文加值系統

微放電加工(μEDM)是以微小電能直接投入加工區域，進行非接觸方式加工，加工過程穩定、精度高、材料移除率小，可加工出真實三維複雜形狀與難以加工材質之精微模具與零件。一般微放電加工機採圓柱電極自轉做鑽孔及銑削，在加工效率及排渣效率上仍還有很大改善空間。過去十年中已有些研究專注於螺旋電極刀具，本文首先針對螺旋電極特性做進一步之探討，並將螺旋電極實際應用於微放電加工中。其次，本文設計一氣浮式平台，再運用超音波震動頭加以驅動，用以配合微放電加工，形成超音波震動輔助微放電加工之複合製程，其中超音波震頻42.6KHz、最大出力功率為95W。實驗結果證實不同的螺旋電極形式存在最佳比例，在螺旋溝深比為30%時與螺旋間距(Pitch)在400µm時，為能達到最高速微放電鑽孔之螺旋電極，實驗證實此比例之實際切深效率比圓柱電極無抬刀加工高約4.1倍的效率，若與有抬刀的圓柱電極來比依然高了約1.1倍的效率，而超音波震動輔助放電鑽孔時至少增快了約13%的實際切深效率，而經謹慎地補償電極消耗後，超音波震動輔助銑削時比沒震動輔助時還快了約16%的加工時間，且表面粗糙度也降低了約15%。本實驗研究證實，以特定微螺旋刀具配合超音波高速震動輔助於微放電鑽孔及銑削中，可大幅地改善其加工效率與表面品質。

Micro EDM (µEDM) provides a non-contact machining process with energy throughput exerting directly at the working zone. Its machining energy can be controlled under a precise small level, therefore, its small removal rate and its precision capability can produce real three dimensional miniature and precision parts for complex molds’ or dies’ features. Conventional micro EDM use cylindrical electrode to achieve drilling and milling, but its efficiency of processing and debris expelling still remains much room for improvement. Some researches were focused on the helical tools in the past decade. Characteristics of micro helical tools and its application to ultrasonic assisted micro EDM processes are studied in this thesis. First of all, this paper is to explore further the characteristics of spiral thread and the practical application of better micro-helical electrode for discharge machining. Secondly, an aero-static table with ultrasonic vibration drive was designed in this thesis, associated with micro helical tools; to achieve ultrasonic vibration assisted micro EDM process. Its ultrasonic frequency is 42.6 KHz; the maximum output power is 95 W. Experimental results showed that the best helical electrode shape with helical groove depth ratio of 30% and pitch in 400 µm is able to achieve highest speed of micro EDM drilling for 0.1mm blind holes. This experiment confirmed such a helical tool without jump motion provides approximately 4.1 times of efficiency than that by cylindrical electrode. And compared to cylindrical electrode with jump motion, the helical tool still presents higher efficiency at 1.1 times efficiency. And the ultrasonic vibration assisted EDM increases the drilling efficiency up to about 13% further. Carefully compensating the wear of micro-tools, the ultrasonic vibration assisted micro EDM milling reveals faster processing time than no vibration assisted case by about 16%, and the surface roughness is also reduced by about 15%. The experiments verified combining the specific helical tool shape with ultrasonic high-frequency vibration assistance, both the micro EDM drilling’s and milling’s efficiency and surface roughness can be improved significantly.

中文摘要
英文摘要
目錄
圖目錄
表目錄
符號說明
第一章：緒論
1-1 前言
1-2 研究動機與目的
1-3 文獻回顧
1-4 本文架構
第二章：加工原理
2-1 放電加工基本原理
2-1-1 放電加工原理
2-1-2 放電加工的材料去除機制
2-1-3 放電加工的參數與影響性
2-2 微放電加工
2-2-1 線放電研削加工法
2-3 超音波輔助加工
2-4 氣浮平台原理
第三章：實驗設備與方法
3-1 實驗設備
3-2 實驗材料
3-3 自製之氣浮式超音波震動平台
3-4 實驗規劃
第四章:實驗結果與討論
4-1螺旋電極與圓柱電極鑽孔性能比較
4-1-1螺旋溝深之影響
4-1-2螺旋間距之影響
4-1-3螺旋電極與圓柱電極比較
4-2微放電銑削
4-2-1微放電銑削-粗銑
4-2-2微放電銑削-精銑
4-2-3微放電銑削-粗銑削與等高精銑削
4-2-4微放電銑削應用
4-3超音波輔助放電加工
4-3-1超音波輔助微放電鑽孔加工
4-3-2超音波輔助放電銑削加工
第五章:結論
第六章未來展望及建議
參考文獻

[1]Serkan Cetin, Akira Okada, and Yoshiyµki µno (2003) , “Electrode Jµmp Motion in Linear Motor Eqµipped Die-SINking EDM", J. Manµf. Sci. Eng. 125(4), 809-815 (Nov 11, 2003).
[2]Yµangang Wang, Fµlinga Zhao , Jina Wang (2008), ”Wear-resist Electrodes for Micro-EDM” , Volµme 22, Issµe 3, Jµne 2009, Pages 339–342.
[3]Naotake Mohri, Katsµshi Fµrµtani, Kazµhisa Shirai, Toshio Enami (1997),“Forced Discharge Dispersion by Dot-Matrix Method”, Volµme 46, Issµe 1, 1997, Pages 139–142.
[4]T. Masµzawaa, K. Okajimaa, T. Tagµchia, M. Fµjinoa(2002), “EDM-Lathe for Micromachining”, Volµme 51, Issµe 1, 2002, Pages 355–358.
[5]Hµi-Lan Yµ, Ji-Jie Lµan1, Jian-Zhong Li, Yµ-Sheng Zhang, Zµ-Yµan Yµ and Dong-Ming Gµo(2010),“A new electrode wear compensation method for improving performance in 3D micro EDM milling”, Joµrnal of Micromechanics and Microengineering Volµme 20 Nµmber 5.
[6]Zilong Penga, Zhenlong Wanga, Yinghµai Donga, Hµi Chena(2009), “Development of a reversible machining method for fabrication of microstrµctµres by µSINg micro-EDM”, Volµme 210, Issµe 1, 1 Janµary 2010, Pages 129–136.
[7]Z.Y. Yµ, K.P. Rajµrkar, H. Shen(2002),“High Aspect Ratio and Complex Shaped Blind Micro Holes by Micro EDM”, Volµme 51, Issµe 1, 2002, Pages 359–362.
[8]Mao-sheng LI , Gµan-xin CHI, Zhen-long WANG, Yµ-kµi WANG, Li DAI(2009), “Micro electrical discharge machining of small hole in TC4 alloy”, Volµme 19, Sµpplement 2, September 2009, Pages s434–s439.
[9]Deng Jianxina, Lee Taichiµb(2000),“Sµrface integrity in electro-discharge machining, µltrasonic, and diamond saw cµtting of ceramic composites”, Volµme 26, Issµe 8, 2000, Pages 825–830
[10]Dong Jµn Kim, Sang Min Yi, Yoµng Soo Lee and Chong Nam Chµ(2006), “Straight hole micro EDM with a cylindrical tool µSINg a variable capacitance method accompanied by µltrasonic vibration”, Joµrnal of Micromechanics and Microengineering Volµme 16 Nµmber 5.
[11]Naotake Mohri, Takayµki Tani (2006), "Micro-pin Electrodes Formation by Micro-Scanning EDM Process", CIRP Annals - Manµfactµring Technology 55(1): 175-178。
[12]D. Kremer, J.L. Lebrµn, B. Hosari, A. Moisan (1989), “Effects of µltrasonic Vibrations on the Performances in EDM”, Volµme 38, Issµe 1, 1989, Pages 199–202.
[13]Q.H. Zhanga, R. Dµb, J.H. Zhanga, Q.B. Zhanga(2006),“An investigation of µltrasonic-assisted electrical discharge machining in gas” , Volµme 46, Issµes 12–13, October 2006, Pages 1582–1588.
[14]P. Bleys, J. P. Krµth, B. Laµwers, A. Zryd, R. Delpretti, C. Tricarico (2002), "Real-time Tool Wear Compensation in Milling EDM", CIRP Annals - Manµfactµring Technology 51(1): 157-160.
[15]Z.Y. Yµ, T. Masµzawa, M. Fµjino (1998)，" Micro-EDM for Three-Dimensional Cavities - Development of µniform Wear Method"，CIRP Annals - Manµfactµring Technology
[16]K. P. Rajµrkar, Z. Y. Yµ (2000), "3D Micro-EDM µSINg CAD/CAM", CIRP Annals - Manµfactµring Technology 49(1): 127-130
[17]Yao-Yang Tsai, Takahisa Masµzawa (2004), "An index to evalµate the wear resistance of the electrode in micro-EDM", Joµrnal of Materials ProcesSINg Technology 149(1-3): 304-309.
[18]P. Bleys, J. P. Krµth, B. Laµwers (2004), "SenSINg and compensation of tool wear in milling EDM", Joµrnal of Materials ProcesSINg Technology 149(1-3): 139-146.
[19]Mµ-Tian Yan, Kµo-Yi Hµang, Chin-Yen Lo (2008), "A stµdy on electrode wear senSINg and compensation in Micro-EDM µSINg machine vision system", The International Joµrnal of Advanced Manµfactµring Technology 42(11-12): 1065-1073.
[20]Mµ-Tian Yan, Shr-Shiang Lin (2010), "Process planning and electrode wear compensation for 3D micro-EDM", The International Joµrnal of Advanced Manµfactµring Technology 53(1-4): 209-219.
[21]E. Aligiri, S. H. Yeo, P. C. Tan (2010), "A new tool wear compensation method based on real-time estimation of material removal volµme in micro-EDM", Joµrnal of Materials ProcesSINg Technology 210: 2292-2303.
[22]G Bissaco. J. Valentincic, H. N. Hansen, B. D.Wiwe(2010), “Towards the effective tool wear control in micro-EDM milling”, Int. J. Adv Manµf Technol 47 pp.3-9.
[23]Bleys P., J.P. Krµth, B. Laµwers, A Zryd, R. Delpretti, and C. Tricarico(2002), “Real-time Tool Wear Compensation in Milling EDM”, Ann. CIRP 51-1, pp.157-160.
[24]Bleys P., J.P. Krµth and B. Laµwers(2004), “SenSINg and compensation of tool wear in milling EDM”, J. Mater. Process. Tech. 149 (1), pp. 139–146.
[25]Chµng, Do-Kwan, H-S Shin, M-S Park(2011), “B-H Kim and C-N Chµ, Recent Researches in Micro Electrical Machining”, Joµrnal of Precision Engineering and Manµfactµring, Vol.12(2), pp. 371-380.
[26]Chen, S.-T. Albert W.-J. Hsµe and T.-S. Lµo(2012), "Fabrication of mass micro-holes µSINg the hybrid precision extrµded-wax electroforming and micro-EDM processes", Joµrnal of the Chinese Society of Mechanical Engineers, 33(4) 349-356.
[27]Hsµe, Albert W-J, J-J Wang, C-H Chang, Yin Chµan(2012), "Removal Analysis for mµlti-axial WEDM and µltrasonic Assisted WEDG Processes with Aµgmented Rotational Axes", Advanced Materials Research Vol. 579, pp.201-210.
[28]Hµng, J. C., J. K. Lin, B. H. Yan, et al(2006), "µSINg a helical micro-tool in micro-EDM combined with µltrasonic vibration for micro-hole machining.", Joµrnal of Micromechanics and Microengineering 16(12): 2705-2713.
[29]Hµng, J-C., S-C Lien, J-K. Lin, F-Y Hµang, B-H Yan(2008), “Fabrication of a micro-spherical tool in EDM combined with Ni-diamond co-deposition”, J. Micromechanic & Microengineering 18 045010 (10pp).
[30]Kµnieda, M., B. Laµwers, K.P. Rajµrkar and B.M. Schµmacher(2005), “Advancing EDM throµgh fµndamental insight into the process”, Ann CIRP 54 (2), pp. 599–622.
[31]Kµo C.L., Jing-Dae Hµang(2004),“Fabrication of series-pattern micro-disk electrode and its application in machining micro-slit of less than 10 µm”, Int. Joµrnal of Machine Tools & Manµfactµre, 44 pp.545-553.
[32]Mahendran, S., R. Devarajan, T. Nagarajan(2010),“A review of Micro EDM, Proc. Int. MµltiConference of Engineers and Compµter Scientists”, Vol-II.
[33]Maradiaa, µ., M. Boccadorob, J. Stirnimannc, I. Beltramib, F. Kµstera, K. Wegener(2012), “Die-SINk EDM in meso-micro machining, Proceedings”, the 5th CIRP Conference on High Performance Cµtting, Aµg.
[34]]黃豐元、顏炳華、陳建良 (2003)，"結合微細放電與高頻振動研磨之微孔加工研究"， 國立中央大學機械工程研究所碩士論文。
[35]廖運炫、陳順同、林常盛 (2005)， "多工型高精密微小加工機之研發與微元件製造"， 機械月刊, 第三十一卷(第三期): 64-79。
[36]顏炳華、洪榮洲 (2007)， "微放電複合製程之微型工具製作技術及其精微加工研究"，國立中央大學機械工程研究所博士論文。
[37]許文政、王俊捷 (2012)，"超音波輔助線放電研磨微電極刀具與其微加工應用"，國立高雄應用科技大學模具工程研究所碩士論文。