臺灣博碩士論文加值系統

本論文中，主要利用自製的鋅擴散鈮酸鋰相位調制器，搭配共路徑雙極化內差干涉術與光雙折射感測原理(Birefringence；BR)，再結合LabVIEW程式平台，發展出一個簡單的流體光學感測系統，並探討不同結構的流體光學感測器(Fluidic Optic Sensor；FOS)之液體濃度與折射率變化量測。
在實驗中為得到最佳化之量測特性，針對感測器則是提出不同結構設計，例如感測器容量的大小、液體流入流出口的位置、光雙折平板的種類(LN、KTP)。固定入射光角度，並用蠕動幫浦將動態流體，經由感測器上的出入流道注入其中，由於檢測光的相位變動與流體之折射率有關，而流體折射率又和成份或濃度有關，因此，在通入不同流體(如食鹽水、自來水、飲用水、二氧化氯水溶液)或是同一成份不同濃度之流體，會同時觀察到相位的變動，因此，便能作為即時流體性質監測之應用。
整合光波導相位調制器與波導感測器於鋅擴散鈮酸鋰基板，可以製作更積體化的光學感測晶片。其中光波導感測器之原理如同之前所提之雙折原理，當光波導上方有不同折射率液體覆蓋時，對波導內傳播之正交極化光，亦會有雙折改變之影響，因此，經由適當傳播長度下(如同雙折平板厚度)，出射光也會造成正交極化相位延遲量之變動。在先期的驗證中，先在光波導感測器的表面區域做局部框膠，當酒精滴入時可以侷限於感測區，經由量測到之相位變動，可探討酒精溶液於波導表面蒸發的特性，而在未來若再結合流道設計，則是可以作為動態流體性質之即時監測系統。

In this thesis, a birefringence (BR) principle is adopted for an optical instrument based on a common-path homodyne interferometer, therein a homemade Zn-Indiffused lithium niobate phase modulator is used for the phase modulation of probe light, and the data acquisition and the demodulation of phase signal is performed through LabVIEW-based platform. A simple fluidic optic sensor (FOS) is proposed to monitor the phase variations of different kinds of fluidic medium due to the refractive index changes. To achieve the best instrument performance, the FOS structures are explored by comparing the corresponding phase shifts for the exchange between two different liquids.
In the experiments, there are various designs are proposed and evaluated to optimize the measured performance by considering the structures of FOS. For examples: volume of sensor, positions of outlet and inlet, and birefringent plates (LN and KTP). The liquid is delivered into the FOS through the channels of outlet and inlet driving by a tubing pump. There is a relationship between the measured phase variation and the refractive index changes of input liquids. At the same time, the refractive index of fluidic medium is dependent on the concentration of solution and the liquid category. Therefore, phase variations with the different liquids (salt water, city water, drink water, ClO2 solution) can be observed instantly to analyze the characteristics of the fluidic liquids.
A compact optical sensing chip is available by integrating a waveguide phase modulator and a waveguide sensor in a Zn-indiffused lithium niobate substrate. The sensing principle of the proposed waveguide sensor is similar to BR. Birefringence of two propagating orthogonal polarizations in a waveguide that is dependent on the cover liquids. The sensing light with a prompt propagation distance (similar to a thickness of birefringent plate) that will cause the varied phase delay under the different cladded liquids. In initial verification, a curing epoxy onto waveguide surface is used to confine a drop of methanol. The evaporated performance of methanol is observed through the measured phase variations. By combining the fluidic channel, the optical instrument can provide real-time monitoring on the fluidic liquids with a compact system.

摘要 I
Abstract II
誌謝 IV
目錄 V
表目錄 VIII
圖目錄 IX
第一章 緒論 1
1.1 研究背景 1
1.2 研究動機 3
第二章 基本原理 6
2.1 鈮酸鋰晶體特性 6
2.1.1 鈮酸鋰之電光效應 7
2.1.2 鈮酸鋰之光折效應 9
2.2 磷酸氧鈦鉀晶體特性 10
2.3 相位調制器簡介 11
2.3.1 相位調制器基本原理 12
2.3.2 雙極化共路徑干涉器 13
2.3.3 單極化分離路徑Mach-Zehnder干涉器 15
2.4 光雙折感測器原理 15
2.5 液體濃度感測器之應用 18
第三章 相位調制器製程與量測 19
3.1 相位調制器製程 19
3.1.1 相位調制器介紹 19
3.1.2 波導層製作 20
3.1.3 電極層製作 27
3.1.4 保護層製作 28
3.2 相位調制器量測 29
3.2.1 Vπ量測 29
3.2.1(a) 單通道-Vπ量測 29
3.2.1(b) 雙通道-Vπ量測 30
3.2.1(c) Mach-Zehnder干涉器-Vπ量測 32
3.2.2 相位穩定度量測 33
3.2.2(a) 單通道-相位穩定度 33
3.2.2(b) 雙通道-相位穩定度 35
3.2.2(c) Mach-Zehnder干涉器-相位穩定度 37
第四章 實驗結果與討論 39
4.1 流體光學感測系統 39
4.1.1 LN-流體光學感測器 40
4.1.2 KTP-流體光學感測器 50
4.2 積體化感測晶片量測 58
4.2.1 感測晶片量測-單通道 58
4.2.2 感測晶片量測-雙通道 61
第五章 結論與展望 63
5.1 結論 63
5.2 展望 65
參考文獻 66

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