臺灣博碩士論文加值系統

本論文，主要以自製鋅擴散鈮酸鋰相位調制器，搭配共路徑極化內差干涉法，探討反射極化旋轉(Reflective Polarization Rotation；RPR)架構在非旋光溶液濃度之量測，並以LabVIEW程式結合多工處理器機台(PXI-1031)做訊號接收與分析，發展出了一套簡單的反射極化旋轉相位量測系統。
利用RPR量測原理，進一步模擬在兩種不同光學參數之量測應用：一、 光學等向性之平板折射率量測；二、不同溶液(甘油、鹽水)濃度變化(折射率變動)之量測，分析入射角度及不同平板(LN、TiO2、Glass)之量測特性差異。
實驗上則以LN平板為反射界面，量測不同濃度甘油所造成之相位變化，也發現其變化趨勢與模擬結果相符合。並且推算出線性極化光，在經由不同相對折射率條件反射後，當液體由低濃度變化到高濃度，會使得極化方向往左邊旋轉，且軌跡為螺旋內縮，若從高濃度往低濃度變化則為右偏螺旋外擴。
此外，也在鈮酸鋰基板上以鋅擴散方法製作出雙通道相位調制器，量測其波導極化相依特性、電光調制特性。此部分初步驗證結果，搭配多工處理器機台，可擴充更多通道，而以LabVIEW程式為主之內差干涉訊號擷取與分析，可以有效消弭因製程造成之波導極化相依影響，維持一定的相位量測穩定度，而多通道相位調制晶片再結合波導感測器，預期也將可以增進光學量測晶片之多功能性。

In this thesis, a homemade Zn-Indiffused lithium niobate (LN) phase modulator employed in a common-path homodyne interferometer which is proposed to explore the concentration measurements of achiral solutions by utilizing the phenomenon of reflective polarization rotation (RPR). The developed simple RPR phase measurement system is performed in LabVIEW-based platform which is used to signal acquisition and data analysis.
The simulations of optical parameter measurements are proposed according to the RPR principles. Two applications are mainly focused on the refractive index measurements of optically isotropic plates and liquid solutions. The measurement performance of concentration variations depending on the incident angles and plates (LN, TiO2, Glass) has been studied for different liquids.
In the experiments, LN plate is adopted for the reflection boundary. It is found that the similar trends between the simulations and experimental results for the measurements of different concentrations of glycerol. The incident linear polarization is changed helically through the reflection under the different related refractive index changes. The trace of linear polarization is anticlockwise rotation with a convergent spiral when the concentrations changed from low to high. Otherwise, the trace is reverse with a divergent spiral when the concentrations changed from high to low.
By the way, the dual channel phase modulator is fabricated in the Zn-Indiffused LN substrate. The characteristics of polarization-dependence loss and electro-optic modulation are discussed according to the experimental results. The results show that the phase modulated channels can be expanded by using the multiplexed signal processing system. The phase measurement errors caused by the waveguide fabrication issues of polarization dependent loss can be improved by the homodyne technique performed in LabVIEW platform. It will be possible that the multi-channel phase modulated waveguides integrated with waveguide sensors can enhance the wide functions of the optical sensing chips.

摘要 I
Abstract II
誌謝 IV
目錄 V
表目錄 VIII
圖目錄 X
第一章 緒論 1
1.1 研究背景 1
1.2 文獻回顧 2
1.3 研究動機 5
第二章 基本原理 6
2.1 極化 6
2.2 雙折射 8
2.3 旋光性 8
2.4 光學內差干涉術 10
2.5 旋轉角量測原理 11
2.6 旋光性量測原理 12
2.7 反射極化旋轉架構之原理 13
第三章 雙通道相位調制器製程 16
3.1 雙通道相位調制晶片製程 16
3.1.1 雙通道相位調制器介紹 16
3.1.2 波導層製作 17
3.1.3 電極層製作 26
3.1.4 保護層製作 26
3.1.5 Sputter製程 27
3.1.6 模厚測量 28
3.1.7 溶液調配 29
3.2 雙通道相位調制晶片量測 30
3.2.1 波導極化探討 30
3.2.1(a) 單通道-波導極化相依性量測 30
3.2.1(b) 雙通道-波導極化相依性量測 32
3.2.2 波導V量測 33
3.2.2(a) 單通道-V量測 33
3.2.2(b) 雙通道-V量測 34
3.2.3 相位穩定度量測 35
3.2.3(a) 單通道-相位穩定度 35
3.2.3(b) 雙通道-相位穩定度 37
3.2.4 雙通道電極探討 38
第四章 反射極化旋轉量測 40
4.1平板反射量測 40
4.1.1改變平板折射率(模擬) 40
4.1.2平板加熱(實驗) 44
4.1.3改變TM、TE比值對於平板影響(模擬) 47
4.2 旋光溶液量測 49
4.1.2葡萄糖 50
4.1.2(a) TPR 50
4.1.2(b) RPR 51
4.2.2果糖 52
4.2.2(a) TPR 52
4.2.2(b) RPR 53
4.3非旋光溶液量測 53
4.3.1甘油 54
4.3.1(a) LN平板 54
4.3.1(b) TiO2平板 61
4.3.1(c) Glass平板 64
4.3.2鹽水 68
4.3.2(a) LN平板 68
4.3.2(b) TiO2平板 72
4.3.2(c) Glass平板 74
第五章 結論與展望 77
5.1結論 77
5.2展望 78
參考文獻 79

[1] 邱文純“維生素C的旋機”行政院國家科學委員會-普科知識 406期 (2006).
[2] 冀政勤 毛翰梅“有機化學”五南.
[3] P. Dirksen J. V. D. Werf, and W.Bardoel “Novel two-frequency laser,”Prec. Eng. Vol. 17 No. 2 pp. 114-116. (1995).
[4] W. K. Kuo J. Y. Kuo, and C. Y. Huang “Electro-optic heterodyne interferometer”Appl. Opt. Vol. 46 No. 16 pp. 3144-3149 (2007).
[5] 金鴻鈞 周晟 李志宏 蘇良石“即時光學外差干涉式量測旋光度之技術”光學工程 第四十二期(1991).
[6] C. M. Wu and Y. C. Tsai“Angular displacement-enhanced heterodyne polarimeter for the measurement of optically active media” Sensors and Actuator B Vol. 120 pp.324-328 (2006).
[7] J. Y. Lee and D. C. Su “Improved common-path optical heterodyne interferometer for measuring small optical rotation angle of chiral medium” Opt. Commun. Vol 256 pp.337-341 (2005).
[8] J. Y. Lin K. H. Chen and J. H. Chen “Optical method for measuring optical rotation angle and refractive index of chiral solution” Appl. Opt. Vol. 46 pp. 5944-5950 (2007).
[9] C. C. HsuS. Y. Chen and Y. C. Chen “Measuring the refractive index of transparent materials using high precision circular heterodyne interferometry” Opt. Laser Eng. Vol. 50 pp.1689-1693 (2012).
[10] Z. C. Jian C. C. Hsu and D. C. Su “Improved technique for measuring refractive index and thickness of a transparent plate” Opt. Commun. Vol. 226 pp. 135-140. (2003).
[11] Eugene Hecht “OPTICS” fourth edition Addison Wesley.
[12] 吳忠義 康智傑 楊奇達 “物理光學” 滄海.
[13] 黃俊達 陳金嘉 楊奇達 楊國輝 雷伯勳 “光電子學” 高立.
[14] 葉玉堂 饒建珍 “幾何光學” 五南.
[15] 余樹楨“晶體的旋光特性”行政院國家科學委員會-普科知識 449期 (2010).
[16] Complete Dictionary of Scientific Biography “Biot, Jean-Baptiste” (2008).
[17] 周炳辰“十大美麗化學實驗-巴斯德召喚光之美”台灣大學科學教育發展中 心.
[18] O. Exnoyan H. F. Taylor W. Matous T. Ottinger and R. R. Neugaonkar “Comparison of photorefractive damage effect in LiNbO3 LiTaO3 and Ba1-xSrxTiyNb2-yO6 optical waveguides at 488nm wavelength” Appl. Phys. Lett. Vol. 71 No. 21 pp. 3051-3053 (1997).
[19] R. C. Twu, H. H. Lee, C. Y. Yang, and H.Y. Hong, “Zn-diffused polarization phase modulator in X-Cut lithium niobate,” MOC’07., Paper No. H-71, Kagawa, Japan (2007).
[20] R. C. Twu R. T. Liao and H. C. Su “A single-beam probe method for roll angle measurement,” ICP 2011, Paper No. P2-15, Kota Kinabalu, Malaysia (2011).
[21] R. C. Twu K. W. Wang  H. Y. Tu  J. L. Syu, and C. W. Hsueh “Common Path Homodyne Interferometer for Optical Activity Measurements,” 2011 International Symposium on Nano Science and Technology, pp. 290-291, Tainan, TAIWAN (2011).
[22] R. C. Twu H. Y. Hong and H. H. Lee “Dual-channel optical phase measurement system for improved precision” Opt. Lett. Vol. 33 No. 21 pp. 2530-2532 (2008)
[23] 國家實驗研究院儀器科技研究中心出版 “光學元件精密製造與檢驗”全華.
[24] R. A. Becker “Thermal fixing of Ti-indiffused LiNbO3 channel waveguides for reduced photorefractive susceptibility” Appl. Phys. Lett. Vol. 45 No. 2  pp. 121-123 (1984).
[25] 王奎文 “共路徑極化旋光量測系統” 南台科技大學光電工程系 碩士論文 (2012).
[26] 洪浩洋 “鈮酸鋰光波導相位調制器光折量測系統之開發與應用” 南台科技大學光電工程系 碩士論文 (2008).
[27] R. C. Twu K. W. Wang, and C. W. Hsueh “Lithium niobate waveguide phase modulator for roll angular displacement measurements,” International Photonics Conference 2011 (IPC2011), PB-FR-12, Tainan, TAIWAN (2011).