臺灣博碩士論文加值系統

在本論文中首度提出，利用氧化鎂掺雜之鈮酸鋰基板，並以鋅金屬熱擴散方式製作可見光波導，並嘗試以各種材料分析方法如：可見光穿透光譜、X-ray繞射分析、微拉曼光譜量測及二次離子質譜儀等，來探討熱擴散製程條件對於未摻雜鈮酸鋰基板及氧化鎂掺雜之鈮酸鋰基板，在上述量測，分析此二種基板之差異
。
同時也提出具有抗光折及相位穩定之積體極化控制器，在光學外差干涉量測系統之應用概念，並嘗試以模擬方法，分析穿透及反射式相位感測元件，在角度量測之應用。

In this thesis, a thermally Zn-indiffused method is proposed to fabricate a visible-light guided waveguide in a magnesium oxide doped lithium niobate substrate. To compare the different characteristics between the non-doped and magnesium-doped lithium niobate substrates, some materials analysis techniques including visible light through spectroscopy, x-ray diffraction analysis, Raman spectrum measurement, and secondary ion mass spectrometry have been adopted for evaluating the different properties.
Moreover, an integrated polarization controller with photorefractive insensitivity and stable phase operation, also is proposed for the applications in the optical heterodyne measurement system. A theoretical simulation is adopted to explore a various transmitted and the reflected sensors for the optical angle measurements.

目錄

中文摘要 I
Abstract II
誌謝 III
表目錄 VI
圖目錄 VII
目錄 IV
第一章 緒論 1
1.1 研究背景 1
1.2 研究動機 2
1.2.1 鈮酸鋰長晶摻雜與熱擴散摻雜 3
1.3 鈮酸鋰之基本特性 4
1.3.1鈮酸鋰之電光特性 5
1.3.2鈮酸鋰之光折特性 9
第二章 模態轉換器原理與應用 10
2.1 模態轉換器原理 12
2.2 相位調制器 14
第三章 模態轉換器製程 16
3.1 波導層製作 16
3.1.1 晶片清洗、烤乾 17
3.1.2 光阻塗怖 17
3.1.3光阻軟烤 18
3.1.4 曝光 18
3.1.5 顯影 19
3.1.6 薄膜蒸鍍 20
3.1.7 掀離 22
3.1.8 膜厚量測 22
3.1.9 熱擴散 23
3.1.10 晶片研磨、拋光 23
3.2 緩衝層製作 24
3.3 電極層製作 25
3.4 波導量測 26
第四章 極化控制器在光學量測之應用 29
4.1 雙折射平板理論與模擬分析 30
4.2 全內反射現象理論與模擬分析 35
4.3 表面電漿現象理論與模擬分析 38
4.4 理論與模擬分析 44
第五章 實驗結果與討論 53
5.1 紫外光/可見光光譜儀 53
5.2 X-Ray繞射儀 57
5.3 微拉曼光譜儀 65
5.4 二次離子質譜儀 74
第六章 結論 82
6.1 模擬分析結論 82
6.2 量測分析結論 82
參考文獻 83

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