臺灣博碩士論文加值系統

在本論文中，利用摻雜氧化鎂之鈮酸鋰(MgO:LN)基板，以自製之鋅擴散鈮酸鋰波導電光相位調制器(ZIEOM)，結合光學共路徑外差干涉術，利用以鎖相放大器為主的相位訊號接收與擷取之介面，探討在光學相位量測系統之應用。

利用光雙折原理，當一斜向光入射至雙折平板，則會導致兩正交極化光產生相位延遲現象，作為光學浸潤式溶液折射率(濃度)、角度、與位移感測器使用。在溶液折射率(濃度)量測上，利用1mm厚之KTP雙折平板，可量測重量百分比為0.01%之葡萄糖，折射率量測精準度可達約5.88×10-6 RIU，而食鹽水濃度最低則可量測到約0.1%，折射率量測精準度可至約2.02×10-6 RIU。接著在角度量測上，使用同樣厚度之KTP雙折平板，將折射率為1.7之高折射率油浸入於自製角度感測器內，其角度量測精準度為1.02×10-5 deg。而在微位移量測上，將角度感測器作為位移感測器使用，將折射率為1.473之甘油浸入於位移感測器裡。

在光波導製作材料分析上，首度提出利用氧化鎂掺雜之鈮酸鋰基板，以鈦金屬熱擴散方式製作可見光波導，並利用多種材料分析方法如:光激發螢光、X-ray繞射分析、微拉曼光譜量測等，分別探討不同熱擴散製程條件對於未摻雜及摻雜氧化鎂之鈮酸鋰基板，經過上述方式量測後，比較兩種不同基板之差異性。

In this thesis, a Zn-indiffused magnesium-doped lithium niobate electro-optical phase modulator (ZIEOM) is proposed for the applications of optical common path heterodyne interferometry. A lock-in amplifier is adopted to receive the sinusoidal-like interferometric signals and measure phase difference between the sensing and reference signals.

According to optical birefringence principle, a phase delay between two orthogonal polarizations was observed when the oblique incident light through a birefringent plate. The phase delay changes are dependent on the incident angles and related refractive indices. The concepts have been adopted for the optical sensor designs including liquid concentration, rotation angle and small displacement measurements in the ZIEOM-based heterodyne interferometer. In the liquid concentration measurement, the lowest measured concentration of glucose can reach to 0.01%, and the corresponding refractive index resolution can reach to about 5.88×10-6 RIU. Besides, the concentration of salt water can be measured nearly to 0.1%, and the accuracy of refractive index can reach to 2.02×10-6 RIU by using 1mm thickness of the KTP plate. On the test of optical angle measurement, the results show that the best achieved resolution was about 1.02×10-5deg by putting the KTP plate in the immersion medium with refractive index of 1.7. Furthermore, the optical angle sensor with the immersion glycerin (refractive index 1.473) has been evaluated for the small displacement measurement.

Moreover, a thermally Ti-indiffused method is proposed to fabricate a visible-light guided waveguide in a magnesium-doped lithium niobate substrate. In order to compare the different characteristics between the non-doped and magnesium-doped lithium niobate substrates, some materials analysis techniques including Photoluminescence, X-ray diffraction analysis, and Raman spectrum measurements have been adopted to explore the different properties.

中文摘要 I
Abstract II
誌謝 IV
表目錄 VIII
圖目錄 IX
目錄 V
第一章 緒論 1
1.1 研究背景 1
1.2 研究動機 2
1.3 文獻回顧 4
1.3.1(a) SPR微小角度量測 4
1.3.1(b) SPR位移量測 5
1.3.2 TIR溶液折射率量測 7
1.3.3薄膜厚度與折射率量測 10
1.3.4波長變化量測 12
第二章 基本原理 14
2.1鈮酸鋰(LN)基本特性 14
2.1.1鈮酸鋰電光特性 15
2.1.2鈮酸鋰光折特性 18
2.2磷酸氧鈦鉀(KTP)基本特性 19
2.3外差干涉術基本原理與量測架構介紹 20
2.3.1外差干涉術基本原理 20
2.3.2外差干涉術基本量測架構 21
2.4電光調製器原理 23
2.4.1相位調制器 23
2.5光雙折(BR)感測器理論與應用 25
2.5.1溶液折射率感測器 29
2.5.2旋轉角度感測器 30
2.5.3角度感測器作為位移感測器 31
第三章 波導電光調制器製程 33
3.1 晶片切割 33
3.2 波導層圖形製作 33
3.2.1 清洗晶片及烤乾 34
3.2.2 光阻塗佈 34
3.2.3 光阻軟烤 35
3.2.4 曝光 35
3.2.5 顯影 36
3.2.6 薄膜蒸鍍 37
3.2.7 掀離 37
3.2.8 膜厚量測 37
3.2.9 熱擴散 37
3.2.10晶片研磨及拋光 38
3.3緩衝層製作 39
3.4電擊層製作 39
第四章 實驗結果與討論 41
4.1 電光調制器特性相位穩定度量測 41
4.1.1(a) Vπ (半波電壓)量測 41
4.1.1(b) 雙通道輸出訊號量測 43
4.1.2 相位穩定度量測 45
4.2 溶液折射率與旋轉角度之模擬分析 46
4.2.1 溶液折射率模擬分析 46
4.2.2 旋轉角度模擬分析 51
4.3 溶液折射率(濃度)量測 55
4.3.1(a) 葡萄糖溶液折射率量測 56
4.3.1(b) 食鹽水溶液折射率量測 58
4.4 旋轉角度與微位移量測 60
4.4.1 旋轉角度量測 60
4.4.2 微位移量測 67
4.5 熱擴散製程之材料分析 71
4.5.1 光激發螢光光譜儀 72
4.5.2 X-Ray薄膜繞射儀 76
4.5.3 微拉曼光譜儀 80
第五章 結論 86
參考文獻 89

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