臺灣博碩士論文加值系統

本研究採用真空熱蒸鍍法製備鍺薄膜。根據先前的文獻顯示，已知在氣相沉積過程中在玻璃基板表面加入震動將會改善薄膜的均勻性。因此，這裡採用基底震動來沉積超薄鍺膜。而且，通過改變震動幅度和頻率來執行優化過程。在我們的實驗中，使用康寧EXG無鹼玻璃基板，尺寸為50×50×0.5mm和100×100×0.5mm。首先沉積150nm(含以上)厚的鋁薄膜在玻璃基底上作為基底膜，然後將鍺的超薄膜傾斜地沉積在鋁膜的頂部。發現這些薄膜的顏色由深橙色變為亮橙色，這對應於超薄薄膜的不同厚度，從厚至薄；以及先傾斜蒸鍍一層鋁薄膜，在上面進行水平蒸鍍鍺超薄膜，可以由樣本觀察得知薄膜的顏色先從淺藍色、藍紫色、最後則是橘黃色，同樣的對應於超薄薄膜的不同厚度為由厚至薄。
通過使用表面輪廓儀來測量和校準超薄膜的厚度。在整篇文章中，有八個測量點在樣品表面上進行，在積分球裡分別給定三個光源並將樣品使用夾具固定於積分球內的擴散檔板上以鏡頭拍攝，所使用的鏡頭為SUMSUNG的EX1。並將這八點數據由圖像處理軟體進行觀察，以了解相應的RGB色度，然後在應用CIE 1931色度系統時將其轉換為xyz系統。最後，對超薄膜厚度與色度之間的關係和作用進行了詳細的研究和討論。

In this paper, the ultra-thin films of germanium were prepared by vacuum thermal evaporation method. According to the previous literature reports, it is known that the adoption of vibration on the surface of the glass substrate during the vapor deposition will improve the uniformity of the thin film. Therefore, the substrate vibration was employed here to deposite the ultra-thin germanium film. Also, the optimization process was carried out by varing the vibrating amplitude and frequency. In our experiment, corning EXG alkali-free glass substrate with 50×50×0.5mm and 100×100×0.5mm were used throughout this study. The aluminum films with a thickness over 150nm were firstly deposited as an underneath basis film on the glass substrate. Then the ultra-thin film of germanium was obliquely deposited on top of the aluminum film. It was found that the colors of these Ge films were changed from dark orange to bright orange corresponding to the thickness from thick to thin. On the other way, the aluminum film was obliquely deposited on top of the glass substrate, and the ultra-thin film of germanium is horizontally evaporated onto the Ge surface. By performing the color picture took, it can be observed that the colors of the film were light blue, blue-violet, and finally orange which correspond to the ultra-thin films from thick to thin.
The thickness of the ultra-thin film was measured and calibrated by using a surface profilometer. There were eight measuring points performed on the sample surface throughout this study. Three light sources were given in the integrating sphere and the sample was placed within it and shooted with lens. Here, the lens used was the EX1 of SUMSUNG. Then, the corresponding RGB chromaticity of these eight-point datas were thus examined by the image processing software and then converted them to the xyz system while applying the CIE 1931 chromaticity system. In the final, the relationship and effect between the ultra-thin film thickness and chromaticity were studied and discussed in detail.

摘要……i
Abstract……ii
誌謝……iii
目錄……iv
表目錄……vi
圖目錄……vii
第一章 緒論……1
1.1 前言……1
1.2 光學薄膜的原理……2
1.3 CIE色度系統的簡介…3
1.3.1 RGB色度系統……3
1.3.2 XYZ色度系統轉換……3
1.3.3 色度系統的轉換……4
1.4 研究動機……6
第二章 量測與實驗儀器介紹……8
2.1 量測儀器介紹……8
2.1.1 量測設備……8
2.1.2 量測光源……9
2.1.3 Pixel Color Picker……9
2.2 實驗儀器介紹……10
2.2.1 熱蒸鍍製備系統……10
2.2.2 壓電放大器與壓電致動器……11
第三章 實驗流程與方法……16
3.1 實驗流程……16
3.2 樣品的事前處理……16
3.3 薄膜製備……17
3.4 量測流程……18
3.4.1 薄膜厚度量測……18
3.4.2 薄膜色度量測……18
第四章 結果與討論……24
4.1 鋁薄膜底層對鍺超薄膜色度的影響……24
4.2 不同厚度的鍺薄膜在CIE 1931色度系統上的趨勢……26
第五章 結論……46
參考文獻……47
附錄一……48
Extended Abstract……49

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