臺灣博碩士論文加值系統

本論文研製之樣品主要是在二氧化矽/矽基板上利用射頻磁控濺鍍系統沉積氧化鋅晶種層之後利用黃光微影製程成長出不同線寬之指叉狀電極，再使用水熱法成長出氧化鋅奈米結構來製作成光感測元件。氧化鋅奈米結構主要是利用低溫水溶液法，使用硝酸鋅(Zn(NO3)2搭配六亞甲基四氨(HMT)或是氫氧化鈉(NaOH)調整水溶液的酸鹼度來控制氧化鋅奈米柱及奈米片的成長。完成後的氧化鋅奈米結構透過X光繞射分析儀(XRD)、場發射掃描式電子顯微鏡(FE-SEM)、光致螢光光譜儀量測(PL)來觀察其形貌與特性。透過半導體參數分析儀(keithley 2410)以及照射波長365 nm的紫外光來量測元件的光暗電流比和響應時間。可以發現皆具有良好感測器的潛力。

The light sensors developed in this procedure are mainly used to deposit zinc oxide seed layer on the silicon dioxide/silicon substrate, and then the photo lithography process to grow the interdigitated electrodes with different line widths, and then grow nanostructure by hydrothermal method. The zinc oxide nanostructure is also controlled by a hydrothermal method using zinc nitrate (Zn(NO3)2 with hexamethylenetetramine (HMT) or sodium hydroxide (NaOH) to adjust the Growth of nanorod and nanosheets. Completed zinc oxide nanostructures by X-ray diffraction analyzer (XRD), field emission scanning electron microscopy (FE-SEM), photoluminescence spectrometer measurement (PL) to observing the shape and characteristics of the sample, the light-dark current ratio and response time of the sample can be measured by a semiconductor parameter analyzer (keithley 2410) and ultraviolet light with a wavelength of 365 nm. It can be found that both have good sensor potential.

摘要...i
Abstract...ii
誌謝...iii
目錄...iv
表目錄...vi
圖目錄...vii
第一章、 緒論...1
1.1前言...1
1.2本文架構...2
1.3研究動機...2
第二章、 基礎理論...3
2.1氧化鋅...3
2.1.1氧化鋅材料簡介...3
2.1.2 奈米結構...4
2.2氧化鋅薄膜沉積方式...5
2.2.1薄膜沉積方式...5
2.2.2磁控濺鍍法原理...5
2.3氧化鋅一維奈米結構成長方式...7
2.4光學元件結構...10
2.4.1金屬半導體...10
2.4.2金屬氧化物半導體...11
2.4.3同質接面...11
2.4.4異質接面...12
2.4.5光吸收原理...12
2.4.6光感測器工作原理...13
2.4.7金屬-半導體-金屬光感測器工作原理...14
第三章、 實驗步驟與分析...17
3.1實驗架構...17
3.2光感測器元件製作...18
3.2.1基板清洗...18
3.2.2氧化鋅靶材製作...18
3.2.3氧化鋅薄膜濺鍍...19
3.2.4黃光微影製程...21
3.2.5氧化鋅奈米柱生長...24
3.2.6氧化鋅奈米片生長...26
3.3實驗分析量測儀器介紹...29
3.4光電感測元件特性量測...31
3.5實驗藥品、耗材及儀器介紹...33
第四章、 結果與討論...35
4.1氧化鋅物理特性分析...35
4.1.1氧化鋅薄膜形貌分析...35
4.1.2氧化鋅奈米柱形貌分析...38
4.1.3氧化鋅奈米片形貌分析...41
4.1.4氧化鋅奈米結構之X射線繞射分析...44
4.2光感測器特性分析...46
4.2.1氧化鋅之光感測器光暗電流比分析...46
4.2.2氧化鋅之光感測器響應時間分析...54
第五章、 結論...59
參考文獻...60
Extended Abstract...64

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