臺灣博碩士論文加值系統

本研究重心為開發出染料敏化光動能電池與感測元件結合出具有微小化自供電之感測整合元件，第一部分為我們氧化鋅奈米柱的合成研究，第二部分為氧化鋅奈米柱與染料敏化光動能電池整合之研究。首先，在合成氧化鋅奈米柱之前，透過射頻磁控濺鍍在ITO玻璃基板上沉積400 nm厚度的ZnO晶種層，隨後透過水熱法在90 ℃下合成氧化鋅奈米柱6小時。分析氧化鋅奈米柱的結果表明，氧化鋅奈米柱的平均直徑和最大長度分別約為~99 nm和~1.6 µm。接著，成長完後再製作染料敏化光動能電池，利用刮刀法將大小約為25 nm的二氧化鈦粒子塗佈於ITO基板上，以N3染料作為染料敏化光動能電池的敏化劑。分析染料敏化光動能電池其光電轉換效率約為~4.7 %左右。使用波長為365 nm之紫外光進行量測，測得光暗電流比為47，在不同濕度對光感測器探討水分子吸附於氧化鋅奈米結構表面對光電流的影響，當在不同濕度環境下，其光電流會因溼度的增加會有下降的表現，在不同的濕度環境下能保有一定的飽和速度及回復速度。

In this study, a ZnO nanorods multifunctional sensors with Dye-Sensitized Solar Cells was prepared on ITO conductive glass. There are two part to this experiment: ZnO nanorods and self-power multifunctional sensors. First, a ZnO seed layer was deposited by RF magnetron sputtering on the ITO conductive glass. Then, the ZnO nanorods was grown by hydrothermal method at 90 ℃ for 6 hours. The microstructure of ZnO nanorods were studied by field emission scanning electrical microscope (FESEM). The average length and diameter of the ZnO nanorods was ~99 nm and ~1.6 µm, respectively. After growth ZnO nanorods, TiO2 film coating with doctor blade method by TiO2 nanoparticle size about 25 nm. The sensitizer N3 was used as a charge transfer on the dye-sensitized solar cells. Solar photovoltaic conversion efficiency of dye-sensitized solar cells is about 4.7 %. The photodector and humidity sensor with measurement by UV light with 365 nm. The ZnO nanorods photodector photo-to-dark current ratio is 47. During UV illumination, it was found that current decreases gradually under high humidity, whereas the current increases under low humidity.

摘要......i
Abstract......ii
誌謝......iii
目錄......iv
表目錄......vii
圖目錄......viii
第一章 緒論......1
1.1前言......1
1.2研究動機......3
第二章 文獻回顧......4
2.1氧化鋅介紹......4
2.1.1氧化鋅材料簡介......4
2.1.2奈米結構......5
2.2薄膜成核成長理論......7
2.3氧化鋅奈米結構之合成方式......8
2.3.1化學氣相沉積法(Chemical Vapor Deposition, CVD)......8
2.3.2熱蒸鍍法(Thermal evaporation)......9
2.3.3模板法 (Template method)......9
2.3.4氣體-液體-固體生長法(V-L-S成長法)......10
2.3.5水溶液法 (Aqueous solution method)......11
2.3.6水熱法 (Hydrothermal method)......12
2.4元件結構......14
2.4.1金屬半導體......14
2.4.2金屬氧化物半導體......15
2.4.3同質接面......15
2.4.4異質接面......16
2.4.5光檢測器工作原理......16
2.4.6金屬-半導體-金屬光檢測器工作原理......17
2.5染料敏化太陽能電池(Dye-Sensitized Solar Cell)......20
2.5.1染料敏化太陽能電池結構介紹......20
2.5.2二氧化鈦(Titanium oxide, TiO2)基本特性......20
2.5.3染料分子材料......22
2.5.4電解液介紹......23
2.5.5對電極介紹......24
2.5.6染料敏化太陽能電池工作原理......24
2.5.7太陽能光譜照度(spectrum irradiance)與空氣質量AM (airmass)......26
第三章 實驗步驟與量測設備分析......27
3.1實驗藥品與儀器......27
3.1.1實驗藥品......27
3.1.2使用儀器......28
3.2實驗步驟與架構......29
3.2.1基板清洗......30
3.2.2 ITO導電玻璃基板蝕刻......30
3.2.2氧化鋅薄膜製成......31
3.2.3氧化鋅奈米柱生長......32
3.2.4二氧化鈦薄膜製備......34
3.2.5染料調配與敏化......35
3.2.6電解液調配......35
3.2.7對電極製備......35
3.2.8染料敏化太陽能電池封裝......35
3.2.9整合元件的封裝......36
3.3實驗儀器介紹......37
3.3.1射頻磁控濺鍍系統(RF magnetron sputter system)......37
3.3.2場發射掃描式電子顯微鏡 (Field Emission Scanning Electron Microscopy, FE-SEM)......39
3.3.3 X射線繞射儀(X-ray diffraction, XRD)......39
3.3.4光致發光(Photoluminescence, PL)......40
3.3.5太陽能電池轉換效率......41
3.3.6全波段入射光子轉化效率(Incident Photon Conversion Efficiency, IPCE)......42
3.3.7光感測與濕度感測實驗量測......43
第四章 結果與討論......46
4.1氧化鋅奈米柱之物性分析......46
4.1.1奈米柱形貌分析......46
4.1.2 X-ray繞射儀之氧化鋅奈米柱分析......49
4.1.3 光致發光之氧化鋅奈米柱分析......51
4.2 二氧化鈦薄膜之物性分析......52
4.2.1二氧化鈦薄膜形貌分析......52
4.3 染料敏化太陽能電池量測分析......53
4.3.1分析染料敏化太陽能電池之轉換效率......53
4.3.2分析染料敏化太陽能電池之光電轉化效率......54
4.4 氧化鋅奈米柱感測器之電性分析......55
4.4.1光感測器分析......55
4.4.2濕度感測器分析......56
4.5整合型元件分析......57
4.5.1整合型元件之光感測器分析......57
4.5.2整合型元件之濕度感測器分析......58
第五章 結論......59
5.1結論......59
5.2未來展望......59
參考文獻......60
Extended Abstract......65

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