臺灣博碩士論文加值系統

壓電式奈米發電機（PENG）是一種新興的綠色能源替代品。氧化鋅具有低電阻率以及高透光率的特性，因此氧化鋅被認為是非常具有前瞻性的光電材料。藉由摻雜改變半導體表面化學性質是一種有效的方法，這篇研究證明氧化鋅奈米柱陣列摻雜氯可以明顯提高壓電式奈米發電機的輸出性能。本研究以水熱法生長低密度氯摻雜氧化鋅奈米柱結構在無晶種層的ITO玻璃上，並用此製備奈米發電機。隨後探討生長奈米柱的基板上有無晶種層的差異與化學摻雜對奈米柱的影響。在氧化鋅奈米柱陣列上濺鍍一層Pt薄膜後，與未濺鍍的奈米結構組裝成奈米發電機，利用超聲波驅動其奈米發電機。ZnO奈米發電機的最佳I-V特性為5.62⨯10-6A和4.17⨯10-2V。

Piezoelectric nanogenerator (PENG) is an emerging green energy alternative. ZnO has the characteristic of low resistivity and high transparency, therefore, it is considered as a promising material for the application of the optoelectronics. By changing the doping of the semiconductor surface chemistry is an effective method, the study proved that zinc oxide nanorods array chlorine doping can significantly improve the output performance of PENG. Hydrothermal growth of low density chlorine-doped zinc oxide nano-pillar structure on ITO glass without seed layer and preparation of nanogenerator. Then investigate the effect of the presence or absence nanorods seed layer and the difference in chemical doping of the nanorods grown on the substrate. After sputtering Pt film on ZnO nanorod arrays, the ZnO nanorod arrays with Pt film was assembled with the unsputtered nanostructure, which was driven by ultrasonic waves. The optimal I-V characteristics of ZnO nanogenerator were 5.62⨯10-6 A and 4.17⨯10-2 V.

摘要......i
Abstract......ii
誌謝......iii
目錄......iv
表目錄......vi
圖目錄......vii
第一章 緒論......1
1.1 前言......1
1.2 研究動機與目的......3
第二章 文獻探討與理論......4
2.1 奈米發電機......4
2.1.1 壓電式奈米發電機......4
2.1.2 摩擦式奈米發電機......5
2.2 氧化鋅基本特性......6
2.2.1 氧化鋅型態介紹......7
2.2.2 氧化鋅發光特性......8
2.3 壓電效應......10
2.3.1 壓電效應來源與起因......10
2.3.2 壓電材料應用......12
2.3.3 壓電效應的種類......13
2.4 發電機發電原理......14
2.4.1 蕭特基接觸......14
2.4.2 氧化鋅奈米線發電原理......19
2.5 水熱法......21
2.5.1 水熱法優點......22
2.6 成長氧化鋅奈米柱化學反應......23
2.6.1氧化鋅奈米柱氯摻雜化學反應......24
2.7 薄膜沉積原理......24
2.7.1 鍍金機濺鍍原理......25
2.8 自組裝分子膜......27
第三章　　實驗步驟與設備......29
3.1 實驗藥品與實驗設備......29
3.1.1 實驗藥品......29
3.1.2 實驗設備......30
3.2 實驗架構......31
3.3 奈米發電機的製備......32
3.3.1 清洗ITO玻璃基板......32
3.3.2 熱蒸鍍自組裝分子薄膜......33
3.3.3 低溫水熱法生成氧化鋅奈米柱......33
3.3.4 奈米發電機對電極......36
3.3.5 組裝奈米發電機......37
3.4 分析儀器應用原理......39
3.4.1 場發射掃描式電子顯微鏡......39
3.4.2 X光能譜散佈分析儀......41
3.4.3 X光繞射分析儀......42
第四章 結果與討論......43
4.1 自組裝分子薄膜分析......43
4.1.1 接觸角分析......43
4.2 氯摻雜氧化鋅奈米柱表面型態分析......44
4.2.1 場發射電子顯微鏡分析......44
4.3 氯摻雜氧化鋅奈米柱X光能譜散佈分析......52
4.4 氯摻雜氧化鋅奈米柱X光繞射分析......56
4.5 氯摻雜氧化鋅奈米柱製備壓電式奈米發電機之電性分析......57
第五章 結論與未來展望......65
5.1 結論......65
5.2 未來展望......65
參考文獻......66
Extended Abstract......71

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